35938 LAM RESEARCH INNER GATE DRIVE ASSY 853-012200-002853-012200-002 / INNER GATE LAM 4420, 853-012200-002-J-DFT / LAM RESEARCHLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research 853-012200-002 Inner Gate Assembly REFURBISHED35938 LAM RESEARCH INNER GATE DRIVE ASSY 853-012200-002Lam Research 853-012200-002 Inner Gate Assembly REFURBISHEDLam Research 853-012200-002 Inner Gate Assembly REFURBISHEDLam Research P/N: 853-012200-002 INNER GATE ASSEMBLY REFURBISHEDLam Research P/N: 853-012200-002 Inner Gate Drive Assemly Fully Refurbished Lam Research P/N: 853-012200-002 INNER GATE ASSEMBLY REFURBISHEDLam Research P/N: 853-012200-002 INNER GATE ASSEMBLY REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHEDLAM Research 853-012200-002 Gate Valve DriveLam, ASSY, GATE, DRIVE, INNER, p/n 853-012200-002 -G-230SLam Research 853-012200-002 Inner Gate Bellows Assembly ( Lot Of 10 EA )Lam Research 853-012200-002 Inner Gate Bellows Assembly ( Lot Of 10 EA )Lam Research 853-012200-002 Inner Gate Bellows Assembly ( Lot Of 10 EA )LAM 853-012200-002 Inner Gate AssemblyLAM 4420 Etcher Inner Gate Valve Drive 853-012200-002-H-DFT WorkingLAM Research 853-012200-002-G-230S Inner Gate Valve Drive 4420 Used WorkingLAM 853-012200-002 Inner Gate Assembly (Fully refurbished with order)LAM RESEARCH 853-012200-002-J Gate Drive AssemblyLam Research 853-012200R002 Etcher Inner Gate Valve Drive Actuator 853-012200LAM 4420 Etcher 853-012200-002 Inner Gate Valve Drive workingLAM 853-012261-00 KIT, GATE DRIVE INNER AND O-RINGS
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LAM RESEARCH 853-012200-002

Inner Gate Drive Assembly

Market Availability & Pricing

Part number853-012200-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1104.49 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Gate Valves & Slit Valves › Gate Valve Assemblies
Inner Gate Drive Assembly
LAM RESEARCH853-012200-002inner gate drive assembly
Product description
Inner Gate / Inner Gate Valve Drive Assembly
Specifications and identifiers
provided listing evidence
AssemblyInner gate drive / inner gate valve drive
Listings consistently describe an inner gate drive assembly.
Tool contextLAM 4420 Etcher appears in multiple listings
Specific tool applicability should be verified.
Condition termsRefurbished/working/as-is appear by listing
Condition is listing-specific, not part identity.
Equipment context
  • LAM 4420 Etcher
Applications
wafer handlinggate valve actuationlift mechanismschamber automationGate or isolation valve actuation in etch equipmentReplacement inner gate drive assembly
How it works

A mechanical or electromechanical motion component used to move a lift, gate, valve, or chamber mechanism.

Fit, stroke, motor model, limit sensing, and revision affect motion reliability and tool safety.

Technical guide
stepper motor

Moves in discrete steps for controlled positioning.

assy
Assembly.
What to verify before purchase
  • Exact revision and part-number suffix on the physical label
  • Connector/interface compatibility with the target tool
  • Condition, completeness, and included accessories/sensors
Confirm with the seller
  • Exact OEM datasheet specifications
  • Guaranteed machine compatibility beyond listed evidence
  • Condition or calibration status unless supplied by the seller

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

35938 LAM RESEARCH INNER GATE DRIVE ASSY 853-012200-002

35938 LAM RESEARCH INNER GATE DRIVE ASSY 853-012200-002

USD 4000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Jan 28, 2026 07:02 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
853-012200-002 / INNER GATE LAM 4420, 853-012200-002-J-DFT / LAM RESEARCH

853-012200-002 / INNER GATE LAM 4420, 853-012200-002-J-DFT / LAM RESEARCH

USD 4100.8900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Nov 11, 2025 19:34 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHED

Lam Research P/N: 853-012200-002 / INNER GATE ASSEMBLY / REFURBISHED

USD 4395.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 19, 2024 15:31 UTC
End recorded: Dec 6, 2024 23:50 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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