Lam Research Gate Driver Inner Assembly PN: 853-012261-00134698 LAM RESEARCH GATE DRIVE INNER ASSY 853-012261-001Lam Research P/N: 853-012261-001 / INNER GATE ASSEMBLY Set Of 4 UnitsLam Research P/N: 853-012261-001 / INNER GATE ASSEMBLY Set Of 4 UnitsLam Research P/N: 853-012261-001 INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 / INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 / INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 / INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 INNER GATE ASSEMBLYLam Research P/N: 853-012261-001 INNER GATE ASSEMBLYLam Research 853-012261-001 Gate AssemblyLam Research 853-012261-001 Gate AssemblyLam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lam Research 853-012261-001 Inner Gate Assembly Lot Of (5)Lam Research 853-012261-001 Inner Gate Assembly Lot Of (5)Lam Research 853-012261-001 Inner Gate Assembly Lot Of (5)Lam Research 853-012261-001 Inner Gate Assembly Lot Of (5)Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used LAM Research 4420 Inner Gate Assembly 853-012261-001-4-230 working 853-12230-002Lam Research 853-012261-001 Inner Gate Assembly Lot Of (3)Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly Lot Of (3)Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly Lot Of (3)Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly Lot Of (3)Lam Research 853-012261-001 Inner Gate Assembly 4420 Etcher Used Lam Research 853-012261-001 Inner Gate Assembly Lot Of (3)
Image 1 of 37

LAM RESEARCH 853-012261-001

Inner Gate Assembly

Market Availability & Pricing

Part number853-012261-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales3500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Gate & Slit Valve Assemblies
Inner Gate Assembly
LAM RESEARCH853-012261-001inner gate assembly
Product description
Inner Gate Assembly / Gate Drive Inner Assembly
Specifications and identifiers
observed identity
Component typeInner gate assembly
The repeated identity is inner gate assembly.
Function wordingGate drive inner assembly also appears
Some listings use gate driver/drive wording, suggesting a gate mechanism subassembly.
Platform mentionLam 4420 etcher mentioned
One listing references 4420 Etcher; verify before making compatibility claim.
Equipment context
  • Lam Research 4420 Etcher context
Applications
Lam Research etcher gate mechanismschamber isolation interfacesmechanical gate drive assembliesGate mechanism replacementInner gate or gate drive assembly
How it works

An inner gate assembly is a mechanical subassembly associated with a gate or isolation mechanism between tool regions.

Gate assemblies must match chamber geometry, actuator/linkage configuration, sealing surfaces, and revision.

Technical guide
ASSY
Assembly.
P/N
Part number.
PCB
Printed circuit board.
Rev
Revision level; match for replacement.
What to verify before purchase
  • Confirm whether the part is gate plate, drive, or complete inner gate assembly.
  • Verify Lam 4420 compatibility and revision.
  • Inspect sealing/contact surfaces and linkage wear.
Confirm with the seller
  • Exact chamber/tool compatibility
  • Whether actuator is included
  • Material and coating

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research Gate Driver Inner Assembly PN: 853-012261-001

Lam Research Gate Driver Inner Assembly PN: 853-012261-001

USD 4500.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 31, 2023 16:00 UTC
End recorded: Dec 6, 2024 19:03 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.