853-012500-002 / EDGE SENSOR ASSEMBLY, 853-012500-002-D-3614 / LAM RESEARCHLam Research 853-012500-002 Edge Sensor REFURBISHEDLam Research 853-012500-002 Edge Sensor REFURBISHEDLam Research 853-012500-002 Edge Sensor REFURBISHEDLam Research 853-012500-002 Edge Sensor REFURBISHEDLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RefurbishedLam Research 853-012500-002 Edge Detector RebuiltLAM RESEARCH EDGE DETECTOR 853-012500-002LAM RESEARCH EDGE DETECTOR 853-012500-002LAM RESEARCH EDGE DETECTOR BREAKOUT 853-012500-002LAM Research 4420 853-012500R-002-E-ELM Edge Sensor Assembly 853-012500-002LAM RESEARCH 853-012500-002 ASSY, Edge SensorLam Research  P/N: 853-012500-002 / ASSY, EDGE DETECTOR / REFURBISHEDLAM Research 4420 853-012500-002-E-LEAN Edge Sensor Assembly 853-012500-002LAM RESEARCH 853-012500-002 ASSY, Edge SensorLam Research  P/N: 853-012500-002 / ASSY, EDGE DETECTOR / REFURBISHEDLam Research Edge Detector Assembly 853-012500-002Lam Research Edge Detector Assembly 853-012500-002Lam Research Edge Detector Assembly 853-012500-002268 LAM RESEARCH 853-012500-002-E-LEANLAM Research 853-012500R002-E Edge Sensor AssemblyLam Research Edge Sensor 853-012500-002 Detector Etch EtcherLAM Research 853-012500-002 Assy Edge Sensorlam Research 853-012500-002 ASSY EDGE SENSORlam Research 853-012500-002 ASSY EDGE SENSORLam 4420 Edge Sensor Assembly 853-012500-002-E-3117 Used Working
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LAM RESEARCH 853-012500-002

Edge Detector / Edge Sensor Assembly

Market Availability & Pricing

EDGE FINDER, ASSY

Part number853-012500-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2895 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Control › Sensors & Detectors › Wafer Sensors
Edge Detector / Edge Sensor Assembly
LAM RESEARCH853-012500-002edge detector sensor assembly
Product description
Assy, Edge Detector / Edge Sensor Assembly
Specifications and identifiers
provided listing evidence
Sensor functionEdge detector / edge sensor
Repeated titles identify a wafer edge sensing assembly.
Tool contextLAM 4420 appears in several titles
Likely tool context from listings; verify target compatibility.
Suffix variants853-012500-002-E, 853-012500R002-E appear
Suffixes/revisions should be matched carefully.
Equipment context
  • LAM 4420
Applications
control cabinetsVME or CompactPCI racksinterlock circuitsdigital and analog I/Otool automationWafer edge detectionEtcher wafer-position sensing
How it works

An electronic board or module used for tool control, interlock, communication, or I/O functions.

Correct board revision, firmware, connectors, and bus type can determine whether the tool recognizes and operates the module correctly.

Technical guide
PCB

Printed circuit board carrying electronic components and connectors.

DI/DO
Digital input/digital output.
I/O
Input/output signals between a controller and field devices.
SBC
Single-board computer.
What to verify before purchase
  • Exact revision and part-number suffix on the physical label
  • Connector, cable length, and interface compatibility with the target tool
  • Condition, completeness, and whether any accessories, sensors, or modules are included
Confirm with the seller
  • Exact OEM datasheet specifications
  • Guaranteed machine compatibility beyond listing-title evidence
  • Condition, calibration, or refurbishment status unless supplied by the seller

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-012500-002 / EDGE SENSOR ASSEMBLY, 853-012500-002-D-3614 / LAM RESEARCH

853-012500-002 / EDGE SENSOR ASSEMBLY, 853-012500-002-D-3614 / LAM RESEARCH

USD 1025.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 13, 2026 17:51 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:00 UTC

Availability has not been rechecked; current availability is unknown.

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