Product description
Lam Research edge sensor / edge detector assembly.
Specifications and identifiers
identified features
| Function | Edge sensor / edge detector Supported by repeated descriptions. |
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| Assembly type | Sensor assembly Supported by evidence. |
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| Related parts | 853-012500-001 / -002 / -003 family One description lists related part-number variants; verify exact needed part. |
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Applications
semiconductor manufacturing toolsindustrial equipment maintenancewafer or mechanism edge detectionposition/presence sensing
How it works
A semiconductor equipment spare part or industrial component used in tool support, control, mechanical, gas, or automation subsystems.
Exact part number, revision, configuration, and subsystem compatibility determine whether it can be used as a replacement.
Technical guide
- Assembly
- A grouped part that may include sensor, bracket, wiring, or housing.
- Edge sensor
- Sensor used to detect an edge, position, or presence condition.
What to verify before purchase
- Verify exact OEM part number, revision, connector or fitting configuration, and tool compatibility before installation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.