Lam Research Edge Detector  853-012500-003 RefurbishedLam Research 853-012500-003 Edge Sensor Assembly RefurbishedLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research 853-012500-003 Edge Sensor AssemblyLam Research  / P/N: 853-012500-003 / EDGE DETECTOR ASSEMBLY / REFURBISHEDLam Research  / P/N: 853-012500-003 / EDGE DETECTOR ASSEMBLY / REFURBISHED853-012500-003 /ASSY EDGE SNSR / LAMLam Research Edge Detector Assembly 853-012500-001 853-012500-002 853-012500-003Lam Research Edge Detector Assembly 853-012500-001 853-012500-002 853-012500-003
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LAM RESEARCH 853-012500-003

Edge Sensor Assembly

Market Availability & Pricing

Part number853-012500-003
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2495 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Sensors › Position & Presence › Edge Sensors
Edge Sensor Assembly
LAM RESEARCH853-012500-003Edge sensor assembly
Product description
Lam Research edge sensor / edge detector assembly.
Specifications and identifiers
identified features
FunctionEdge sensor / edge detector
Supported by repeated descriptions.
Assembly typeSensor assembly
Supported by evidence.
Related parts853-012500-001 / -002 / -003 family
One description lists related part-number variants; verify exact needed part.
Related parts
Applications
semiconductor manufacturing toolsindustrial equipment maintenancewafer or mechanism edge detectionposition/presence sensing
How it works

A semiconductor equipment spare part or industrial component used in tool support, control, mechanical, gas, or automation subsystems.

Exact part number, revision, configuration, and subsystem compatibility determine whether it can be used as a replacement.

Technical guide
Assembly
A grouped part that may include sensor, bracket, wiring, or housing.
Edge sensor
Sensor used to detect an edge, position, or presence condition.
What to verify before purchase
  • Verify exact OEM part number, revision, connector or fitting configuration, and tool compatibility before installation.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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