853-012525-002 / LIFTER SPINNER ASSY / LAM RESEARCH CORPLam Research  P/N: 853-012525-002 / Lifter-Spinner, 1.50 Diameter / RefurbishedLam Research 853-012525-002  Lifter-Spinner, 1.50 Diameter AS ISLam Research 853-012525-002  Lifter-Spinner, 1.50 Diameter AS ISLam Research  P/N: 853-012525-002 / Lifter-Spinner "Big Foot" Assembly Lam Research  P/N: 853-012525-002 / Lifter-Spinner "Big Foot" Assembly Lam Research  P/N: 853-012525-002 / Lifter-Spinner "Big Foot" Assembly 9676 LAM RESEARCH LIFTER-SPINNER "BIG FOOT" ASSEMBLY (PARTS ONLY) 853-012525-002Lam Research P/N: 853-012525-002  Lifter/Spinner "BIG FOOT" AssemblyLam Research P/N: 853-012525-002  Lifter/Spinner "BIG FOOT" Assembly Lam Research Lifter Spinner 853-012525-001 & 853-012525-002 AssemblyLAM RESEARCH 853-012525-002 LIFTER SPINNER ASSEMBLY SPIN CONTROLLERLAM RESEARCH 853-012525-002 LIFTER SPINNER ASSEMBLY SPIN CONTROLLERLAM RESEARCH 853-012525-002 LIFTER SPINNER ASSEMBLY SPIN CONTROLLERLAM RESEARCH 853-012525-002 LIFTER SPINNER ASSEMBLY SPIN CONTROLLER
Image 1 of 15

LAM RESEARCH 853-012525-002

Lifter-spinner Big Foot assembly

Market Availability & Pricing

Part number853-012525-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1195 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Mechanical › Wafer Handling › Lift & Spin Assemblies
Lifter-spinner Big Foot assembly
LAM RESEARCH853-012525-002lifter-spinner assembly
Product description
Lam Research lifter-spinner Big Foot assembly, also described as lifter-spinner 1.50 diameter.
Specifications and identifiers
function
FunctionLifter-spinner assembly
Wafer handling assembly combining lift and spin functions.
Nickname/descriptorBig Foot
Assembly nickname or configuration descriptor.
Diameter descriptor1.50 diameter
Dimensional descriptor mentioned in evidence; verify exact meaning.
Applications
wafer handling modulesspin/lift mechanismsLam Research chamber serviceWafer lift/spin mechanism serviceHandling assembly replacementChamber module repair
How it works

A wafer-handling mechanical assembly used to lift and/or rotate a wafer or carrier in a process module.

Lift/spin assemblies must be mechanically correct to avoid wafer mishandling, slip, or alignment errors.

Technical guide
spinner

Rotational mechanism for wafer positioning or process handling.

wafer lift

Mechanism used to raise/lower wafers from support surfaces.

AMAT
Common abbreviation for Applied Materials.
ASSY
Assembly.
PCB
Printed circuit board.
PWB
Printed wiring board; often used interchangeably with PCB.
REV
Revision level; confirm against the required tool configuration.
What to verify before purchase
  • Confirm the Big Foot configuration and diameter descriptor.
  • Check mechanical wear, bearings, drive interface, and missing parts.
Confirm with the seller
  • Exact platform is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-012525-002 / LIFTER SPINNER ASSY / LAM RESEARCH CORP

853-012525-002 / LIFTER SPINNER ASSY / LAM RESEARCH CORP

USD 2750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 1, 2026 14:57 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 17, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research  P/N: 853-012525-002 / Lifter-Spinner, 1.50 Diameter / Refurbished

Lam Research P/N: 853-012525-002 / Lifter-Spinner, 1.50 Diameter / Refurbished

USD 3495.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 19, 2023 20:32 UTC
End recorded: Dec 7, 2024 03:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.