Lam RESEARCH MINIMATCH 853-015030-001LOT OF 3 - LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-0019280 LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001New With Box Lam Research 853-015030-001 UPS Delivery Free ShippingBrand New Lam Research 853-015030-001 MINIMATCH Module US Stock Fast ShippingLam RESEARCH MINIMATCH 853-015030-001Lam Research LAM 853-015030-001 Matchunit-Manuel MinimatchLAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001853-015030-001 / ASSY, MANUAL MATCH CONTROL / LAM RESEARCH COPRLAM 853-015030-001LAM 853-015030-001 T30LAM Research TCP and MiniMatch Manual Controller 853-015982-001 853-015030-001LAM RESEARCH (LAM) 853-015030-001    Matchunit-Manuel (Minimatch)LAM Research Mini Match RF Tuner 853-015030-001                  (LA3)Lam Research Minimatch RF tune manual control PN 853-015030-001 New!LAM 853-015030-001 MATCHUNIT-MANUEL (MINIMATCH)Brand New Lam Research 853-015030-001 MINIMATCH Module US Stock Fast ShippingBrand New Lam Research 853-015030-001 MINIMATCH Module US Stock Fast Shipping
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LAM RESEARCH 853-015030-001

MiniMatch Manual Match Control Assembly

Market Availability & Pricing

Part number853-015030-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales222 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Match Networks
MiniMatch Manual Match Control Assembly
LAM RESEARCH853-015030-001Manual RF match control assembly
Product description
MiniMatch / manual match control assembly, RF tuner or matchunit-manual
Specifications and identifiers
supported identity
Assembly typeMiniMatch manual match control
Manual control or match unit for RF matching hardware.
RF contextRF tuner / matchunit
Repeated RF matching terminology.
Applications
RF plasma systemsmanual matching controlsLam MiniMatch hardwaremanual RF match controlRF tuner service/replacement
How it works

An RF match control or match unit helps tune impedance between an RF generator and plasma load.

Proper matching reduces reflected power and helps maintain plasma process stability.

Technical guide
impedance matching

Adjusts capacitance/inductance or control settings to reduce reflected RF power.

Minimatch
Lam-related match control wording in evidence
RF
radio frequency
What to verify before purchase
  • Verify whether this is the controller, match network, or a manual-control module.
  • Confirm frequency and compatible RF match assembly.
Confirm with the seller
  • Frequency
  • power rating
  • matching network compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam RESEARCH MINIMATCH 853-015030-001

Lam RESEARCH MINIMATCH 853-015030-001

USD 199.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
CN
Condition: Used
Listed: Jun 4, 2025 06:49 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LOT OF 3 - LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001

LOT OF 3 - LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001

USD 300.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 9, 2024 21:31 UTC
End recorded: May 1, 2025 20:23 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
9280 LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001

9280 LAM RESEARCH MINIMATCH, ASSY, MANUAL MATCH CONTROL 853-015030-001

USD 184.1400

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Sep 13, 2017 03:33 UTC
End recorded: Dec 7, 2024 02:59 UTC
Estimated remaining at check: 6
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

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