LAM RESEARCH 853-015130-002 ASSY RF MATCH GEAR DRIVE853-015130-002 / GEAR DRIVEN RF MATCH MINI-MATCH,REFURB,LAM 9600 / LAM RESEARCHLAM RESEARCH 853-015130-002 RF Matcher Brand New Sealed US Stock Fast Delivery853-015130-002 / MINI-MATCH,REFURB,LAM 9600 / LAM RESEARCHLam Research 853-015130-002 MINI-MATCH, LAM 9600LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBLLAM 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBELLY, 114129853-015130-002 / MINI-MATCH,REFURB,LAM 9600 / LAM RESEARCHLam Research P/N: 853-015130-002 / RF Mini-Match Assembly / RefurbishedLAM 853-015130-002-P RF match, usedLam Research 853-015130-002 RF Match Gear Drive Assembly Working SurplusLAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 RF MATCH GEAR DRIVE ASSEMBLLam Research 853-015130R-002-P-ELMPNE RF Match Drive 853-015130-002 RefurbishedLam Research 853-015130-002 RF Mini-MatchLam Research 853-015130-002 RF Mini-Match AssemblyLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini 103 503 102 EtchLam Research 853-015130-002 RF Mini-Match AssemblyLam Research 853-015130-002 RF Mini-Match AssemblyLam Research 853-015130-002 RF Mini-Match AssemblyLam Research 853-015130-002 RF Mini-Match AssemblyLam Research 853-015130-002 RF Mini-Match AssemblyLam Research 853-015130-002 RF Mini-Match AssemblyLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the boxLam RF Match, Gear Drive, Assy 853-015130-002 Upper Etcher Mini, New in the box
Image 1 of 29

LAM RESEARCH 853-015130-002

RF Match Gear Drive Assembly

Market Availability & Pricing

Part number853-015130-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2601 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching Networks
RF Match Gear Drive Assembly
LAM RESEARCH853-015130-002RF match assembly
Product description
Lam RF Match, Gear Drive, Assy Upper Etcher Mini, New in the box
Specifications and identifiers
provided listing evidence
Vendor/model referenceLAM 853-015130-002 LAM Research 4420 RF MATCH GEAR DR, LAM 853-015130-002-P RF match, LAM 9600, LAM 9600 / LAM RESEARCH, LAM RESEARCH (LAM) 853-015130-002 LAM Research 4420 R, LAM RESEARCH 853-015130-002 ASSY RF MATCH GEAR DRIVE, LAM RESEARCH 853-015130-002 RF Matcher Brand New Seal, Lam RF Match
Vendor/model text appears in listing evidence and should be checked against the physical label.
Application/platformLAM 9600
Possible platform/process context from titles; not guaranteed compatibility.
Equipment context
  • LAM 9600
Applications
plasma etchCVD or PVD chambersRF matching networksremote plasma sourcesReplacement or spare RF match assembly for semiconductor equipmentMaintenance, repair, or refurbishment where exact revision and configuration match
How it works

An RF, microwave, matching, or plasma-power component used to deliver or condition process energy in semiconductor tools.

Frequency, power rating, impedance match behavior, connector style, cooling, and revision affect process stability and tool safety.

Technical guide
RF
Radio frequency.
TC
Thermocouple.
What to verify before purchase
  • Exact revision and any suffix on the physical label
  • Connector, flange, size, mounting, and configuration compatibility
  • Condition, cleanliness, calibration, and completeness
  • Whether listing includes only the named component or related assemblies shown in cross-reference titles
Confirm with the seller
  • OEM datasheet specifications unless explicitly shown in listing evidence
  • Guaranteed machine compatibility beyond listed title context
  • Condition or calibration status across all units

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH 853-015130-002 ASSY RF MATCH GEAR DRIVE

LAM RESEARCH 853-015130-002 ASSY RF MATCH GEAR DRIVE

USD 5000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: May 15, 2026 19:52 UTC
Estimated remaining at check: 16
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:24 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
853-015130-002 / GEAR DRIVEN RF MATCH MINI-MATCH,REFURB,LAM 9600 / LAM RESEARCH

853-015130-002 / GEAR DRIVEN RF MATCH MINI-MATCH,REFURB,LAM 9600 / LAM RESEARCH

USD 2995.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Oct 23, 2025 20:10 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 13, 2026 16:18 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.