| Function | ESC heater filters / single channel |
|---|---|
| Alternative_identity | Power module appears repeatedly |
| Revision | Rev B referenced |
A power/filter module used as a replaceable semiconductor equipment component.
Correct identification helps verify fit, electrical/mechanical compatibility, and replacement suitability before installation.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 15, 2026 16:17 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 1 | 448.8200 | 448.8200 | 448.8200000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Jan 9, 2026 17:12 UTC | 853-015686-005 / POWER MODULE REV B / LAM RESEARCH CORPORATION | Completed listing price | 440.56 (currency not captured) | Not established |
| Jan 8, 2026 16:10 UTC | LAM RESEARCH A10038191 , 853-015686-005 POWER MODULE | Completed listing price | 1000 (currency not captured) | Not established |
| Sep 16, 2025 12:59 UTC | 853-015686-005 Rev B Lam Research 853 015686 005 | Completed listing price | 460.52 (currency not captured) | Not established |
| Jul 23, 2025 20:14 UTC | 853-015686-005 / POWER MODULE REV B / LAM RESEARCH CORPORATION | Completed listing price | 440.56 (currency not captured) | Not established |
| Jul 23, 2025 15:16 UTC | Lam Research 853-015686-005 Rev:B Power Module | Completed listing price | 699 (currency not captured) | Not established |
| Jul 3, 2025 12:03 UTC | 5579 Lam Research 853-015686-005 Assy., ESC HTR FLTRS, CHANNEL SNG | Completed listing price | 230 (currency not captured) | Not established |
| Jun 13, 2025 01:14 UTC | 1 pcs Used Lam Research Power Module PN 853-015686-005 | Completed listing price | 699 (currency not captured) | Not established |
| May 1, 2025 11:49 UTC | Lam Research 853-015686-005 Rev:B Power Module,Fedex/UPS fast shipping | Completed listing price | 1405 (currency not captured) | Not established |
| Nov 26, 2024 08:30 UTC | Lam Research 853-015686-005 Rev B Power Module,connector missing,used_,4482(b) | Completed listing price | 189 (currency not captured) | Not established |
| Nov 23, 2024 08:09 UTC | 1 pcs Used Lam Research Power Module PN 853-015686-005 #W4 | Completed listing price | 735.49 (currency not captured) | Not established |
| Sep 2, 2024 07:09 UTC | 35194 LAM RESEARCH POWER MODULE 853-015686-005 | Completed listing price | 1030.18 (currency not captured) | Not established |
| Feb 28, 2024 16:54 UTC | 853-015686-005 Rev B Lam Research 853 015686 005 | Completed listing price | 460.52 (currency not captured) | Not established |
| Dec 6, 2023 18:24 UTC | 853-015686-005 / POWER MODULE / LAM RESEARCH CORPORATION | Completed listing price | 448.82 (currency not captured) | Not established |
| Jun 3, 2023 01:29 UTC | 1 pcs Used Lam Research Power Module PN 853-015686-005 #A6-3 | Completed listing price | 733 (currency not captured) | Not established |
| Jun 2, 2023 00:37 UTC | LAM Research 853-015686-005 Rev B Power module,1015435,Used$92592 | Completed listing price | 179 (currency not captured) | Not established |
| Mar 17, 2023 09:23 UTC | Lam Research 853-015686-005 Power Module Rev. B Used Working | Completed listing price | 408.14 (currency not captured) | Not established |
| Feb 11, 2022 09:29 UTC | Lam Research ASSY ESC HTR FLTRS CHNNEL SNG 853-015686-005 | Completed listing price | 456.5 (currency not captured) | Not established |
| Jan 4, 2022 07:49 UTC | RKC instrument Z-TI0-B | Completed listing price | 149 (currency not captured) | Not established |
| Jan 4, 2022 07:41 UTC | Koganei ORGA 16x230 rodless cylinder | Completed listing price | 129 (currency not captured) | Not established |
| Oct 1, 2021 13:37 UTC | Lam Research 853-015686-005 | Completed listing price | 300 (currency not captured) | Not established |
| Apr 12, 2021 14:35 UTC | Lam Research Power Module, 853-015686-005 Rev B, LOT OF 3 | Completed listing price | 600 (currency not captured) | Not established |
| Apr 6, 2021 00:25 UTC | Lam Research Power Module, 853-015686-005 Rev B, LOT OF 3 | Completed listing price | 600 (currency not captured) | Not established |
| Apr 1, 2021 14:52 UTC | Lam Research Power Module, 853-015686-005 Rev B | Completed listing price | 247 (currency not captured) | Not established |
| Nov 4, 2017 06:33 UTC | Lam 853-015686-005 | Completed listing price | 199 (currency not captured) | Not established |
| Jun 5, 2016 09:57 UTC | 853-015686-005 Rev B Lam Research 853 015686 005 | Completed listing price | 497 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Legacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
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Legacy record; no enhanced status check captured
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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