Lam Research Top RF Assembly Match Manual Module LAM 4400 PN: 853-015982-001LOT OF 2 - LAM RESEARCH TCP RF ASSEMBLY MANUAL MODULE 853-015982-001LAM RESEARCH 853-015982-001LAM 853-15982-001 Alignment Box 402241LAM Research 853-015982-001 Top RF Assembly Match Manual Module for LAM 4400LAM RESEARCH 853-015982-001 Top RF Assembly Match Manual Module LAM 4400LAM RESEARCH 853-015982-001 RF GENERATORLAM RESEARCH 853-015982-001 RF GENERATORLAM RESEARCH 853-015982-001 RF GENERATORLAM RESEARCH 853-015982-001 ASSEMBLY, MANUAL CONTROL BOX - USED2544 LAM RESEARCH TOP RF MATCH MANUAL MODULE 853-015982-001LAM MANUAL CONTROL TUNER 853-015982-001LAM 853-015982-001 Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM 853-015982-001 Lam Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.Lam Research Manual Ctrl Box 853-015982-001LAM RESEARCH 853-015982-001LAM 853-015982-001 Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM 853-015982-001 Lam Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM 853-015982-001 Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM 853-015982-001 Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM 853-015982-001 Lam Top RF Assembly Match Manual Module for LAM 4400 DIP P.C.LAM RESEARCH (LAM) 853-015982-001 Lam Top RF Assembly Match Manual Module for2544 (3) LAM RESEARCH TCP 853-015982-001LAM 853-015982-001 Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001Lam Top RF Match Manual Module, P/N 853-015982-001
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LAM RESEARCH 853-015982-001

Top RF Match Manual Module

Market Availability & Pricing

Part number853-015982-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales275 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching Networks
Top RF Match Manual Module
LAM RESEARCH853-015982-001top RF match manual module
Product description
Top RF Assembly Match Manual Module for LAM 4400
Specifications and identifiers
provided listing evidence
Module functionTop RF assembly match manual module
Listing titles consistently describe an RF match/manual module.
Tool contextLAM 4400
Repeated titles mention LAM 4400 context.
RF positionTop RF assembly
Suggests top RF path, but exact chamber application should be verified.
Equipment context
  • LAM 4400
Applications
RF generatorsplasma sourcesbias matching networksharmonic filteringetch or CVD chambersManual RF matching in LAM 4400 contextTop RF/plasma subsystem service replacement
How it works

An RF power, filter, or matching component used in plasma/process equipment.

RF frequency, power rating, impedance, and matching-network compatibility affect plasma stability and can damage equipment if mismatched.

Technical guide
RF matching

Adjusts impedance between an RF generator and the plasma/load.

low-pass harmonic filter

Passes the desired RF fundamental while reducing higher-frequency harmonics.

MHz
Megahertz.
RF
Radio frequency.
kW
Kilowatt.
What to verify before purchase
  • Exact revision and part-number suffix on the physical label
  • Connector, cable length, and interface compatibility with the target tool
  • Condition, completeness, and whether any accessories, sensors, or modules are included
Confirm with the seller
  • Exact OEM datasheet specifications
  • Guaranteed machine compatibility beyond listing-title evidence
  • Condition, calibration, or refurbishment status unless supplied by the seller

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research Top RF Assembly Match Manual Module LAM 4400 PN: 853-015982-001

Lam Research Top RF Assembly Match Manual Module LAM 4400 PN: 853-015982-001

USD 150.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 11, 2024 19:01 UTC
End recorded: Dec 6, 2024 21:33 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LOT OF 2 - LAM RESEARCH TCP RF ASSEMBLY MANUAL MODULE 853-015982-001

LOT OF 2 - LAM RESEARCH TCP RF ASSEMBLY MANUAL MODULE 853-015982-001

USD 299.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Mar 9, 2024 22:01 UTC
End recorded: May 1, 2025 20:24 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
LAM RESEARCH 853-015982-001

LAM RESEARCH 853-015982-001

USD 1199.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 23, 2022 19:01 UTC
End recorded: Dec 7, 2024 01:59 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 30, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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