LAM RESEARCH 853-017163-001 - Pricing, Details & Pictures | wSemi.com

Market Availability & Pricing

RF SWITCH BOX

Part number853-017163-001

ManufacturerLAM RESEARCH

Current availabilitySee listings below

Latest completed listing with reported sales340 (currency not captured) — public listing price; reported sold quantity is not a verified transaction

RF Switch Box Assembly

LAM RESEARCH853-017163-001RF switch box assembly

Product description

RF switch box assembly for Lam Research equipment.

Specifications and identifiers

identified features

Assembly type	RF switch box Enclosed assembly used to route or switch RF signals/power.
Suffix/revision examples	D, F, G, C117, C185, RFDFT Multiple suffixes appear; revision/configuration must be matched.

Applications

plasma etch systemsRF delivery networksmatch network routingRF routing in plasma toolsSwitching or interlocking RF paths

How it works

An RF switch box is an assembly that routes, switches, or conditions radio-frequency paths between generators, match networks, electrodes, or diagnostic loads.

RF path configuration directly affects plasma generation and impedance matching, so the exact switch-box revision matters.

Technical guide

RF switching

Controlled routing of radio-frequency energy or signals.

RF: Radio frequency; in semiconductor tools, commonly used for plasma generation and bias power.

What to verify before purchase

Verify full dash/revision suffix and connector layout.
Confirm supported tool family before installation.

Confirm with the seller

Exact RF ratings and platform are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research 853-017163-001 RF Switch Box, 300233

Lam Research 853-017163-001 RF Switch Box, 300233

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

IE

Condition: Used

Listed: Sep 16, 2026 14:03 UTC

Estimated remaining at check: 2

Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

USD 294.3100

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Sep 14, 2026 03:32 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:08 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001 RF Switch Box Assembly 853-017163-001-D-1996, 150329

Lam Research 853-017163-001 RF Switch Box Assembly 853-017163-001-D-1996, 150329

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Mar 14, 2024 20:01 UTC

End recorded: Dec 6, 2024 16:53 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 146326

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 146326

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Feb 9, 2024 18:01 UTC

End recorded: Dec 7, 2024 11:39 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001 RF Switch Box, 143507

Lam Research 853-017163-001 RF Switch Box, 143507

USD 1750.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Jan 16, 2024 00:30 UTC

End recorded: Dec 7, 2024 18:08 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:01 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 131412

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 131412

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Oct 13, 2023 22:00 UTC

End recorded: Dec 7, 2024 04:25 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:15 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001-D-C185 RF Switch Box 853-017163-001, 131291

Lam Research 853-017163-001-D-C185 RF Switch Box 853-017163-001, 131291

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Oct 12, 2023 23:30 UTC

End recorded: Dec 7, 2024 08:09 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

Lam Research 853-017163-001 RF Switch Box, 853-017163-001-D-671, 127762

Lam Research 853-017163-001 RF Switch Box, 853-017163-001-D-671, 127762

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Sep 13, 2023 22:00 UTC

End recorded: Dec 6, 2024 18:56 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:05 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

LAM Research, LAM 853-017163-001 RF Switch Box 853-017163-001-D-1273, 123597

LAM Research, LAM 853-017163-001 RF Switch Box 853-017163-001-D-1273, 123597

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Jul 28, 2023 18:00 UTC

End recorded: Dec 7, 2024 14:59 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 120498

Lam Research 853-017163-001-D-C117 RF Switch Box 853-017163-001, 120498

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Jun 26, 2023 23:30 UTC

End recorded: Dec 6, 2024 22:13 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Lam Research 853-017163-001 RF Switch Box 853-017163-001-G-RFDFT, 120101

Lam Research 853-017163-001 RF Switch Box 853-017163-001-G-RFDFT, 120101

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time

US

Condition: Used

Listed: Jun 22, 2023 18:30 UTC

End recorded: Dec 6, 2024 21:14 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Market statistics & price history

Auction listing history. Direct marketplace listings are shown separately.

Auction listing records25

Legacy active status11

Legacy completed status14

Source-reported sold quantity (not verified sales)2

First listedMar 13, 2012 22:55 UTC

Most recently listedSep 16, 2026 14:03 UTC

Positive observed amounts, separated by currency and price basis
Currency	Price basis	Records	Minimum	Maximum	Mean
USD	Observed public listing prices	13	294.3100	1750.0000	962.4715384615384615

Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.

Up to 50 recent listing and quantity-change observations. Observation time is not sale time. Invalid or ambiguous timestamps remain unplotted.
Time recorded	Listing	Observation	Public price	Recorded acceptance
Aug 15, 2026 03:49 UTC	853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH	Completed listing price	363.34 (currency not captured)	Not established
Jun 16, 2026 03:47 UTC	853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH	Completed listing price	354.48 (currency not captured)	Not established
Dec 7, 2024 04:19 UTC	853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH	Completed listing price	443.1 (currency not captured)	Not established
Mar 7, 2024 14:45 UTC	Lam Research 853-017163-001-D-1339 RF Switch Box 853-017163-001, 116717	Completed listing price	1100 (currency not captured)	Not established
Feb 21, 2022 08:05 UTC	3338 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	340 (currency not captured)	Not established
Feb 18, 2022 02:39 UTC	3337 LAM Research 853-017163-001 RF Switch Box	Completed listing price	390 (currency not captured)	Not established
Mar 14, 2020 19:16 UTC	3338 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	340 (currency not captured)	Not established
Mar 14, 2020 19:16 UTC	3337 LAM Research 853-017163-001 RF Switch Box	Completed listing price	390 (currency not captured)	Not established
Feb 14, 2020 06:45 UTC	Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working	Completed listing price	403.12 (currency not captured)	Not established
Oct 8, 2018 20:26 UTC	3337 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	390 (currency not captured)	Not established
Oct 8, 2018 20:21 UTC	3338 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	340 (currency not captured)	Not established
Apr 17, 2017 01:18 UTC	3337 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	390 (currency not captured)	Not established
Dec 9, 2015 17:29 UTC	3338 LAM Research 853-017163-001 Assy. RF Switch Box	Completed listing price	340 (currency not captured)	Not established
Feb 27, 2015 20:04 UTC	LAM RESEARCH (LAM) 853-017163-001 LAM SWITCH BOX RF ASSY; 853-017163-001-F-C5	Completed listing price	650 (currency not captured)	Not established

Pricing & historical listings

Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.

Prices and availability may change. Confirm details with the seller.

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

USD 363.3400

Observed public listing price, not an accepted sale amount.

Observed inactive at check time

US

Condition: Used

Listed: Jun 21, 2026 03:48 UTC

End recorded: Aug 15, 2026 08:49 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Aug 30, 2026 16:21 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

USD 354.4800

Observed public listing price, not an accepted sale amount.

Observed inactive at check time

US

Condition: Used

Listed: Apr 22, 2026 03:46 UTC

End recorded: Jun 16, 2026 08:47 UTC

Estimated remaining at check: 1

Estimated sold at check: 0

eBay response captured — Checked Aug 29, 2026 16:02 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

853-017163-001 / BOX, RF, SWITCH / LAM RESEARCH

443.1 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: May 2, 2023 16:30 UTC

End recorded: Dec 7, 2024 04:19 UTC

Verification lookup unavailable; legacy status shown — Last attempted Aug 13, 2026 16:23 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

Lam Research 853-017163-001-D-1339 RF Switch Box 853-017163-001, 116717

Lam Research 853-017163-001-D-1339 RF Switch Box 853-017163-001, 116717

1100 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Jun 9, 2023 19:30 UTC

End recorded: Mar 7, 2024 14:45 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

3338 LAM Research 853-017163-001 Assy. RF Switch Box

3338 LAM Research 853-017163-001 Assy. RF Switch Box

340 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Mar 15, 2020 22:42 UTC

End recorded: Feb 21, 2022 08:05 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3337 LAM Research 853-017163-001 RF Switch Box

3337 LAM Research 853-017163-001 RF Switch Box

390 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Mar 15, 2020 22:26 UTC

End recorded: Feb 18, 2022 02:39 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3338 LAM Research 853-017163-001 Assy. RF Switch Box

3338 LAM Research 853-017163-001 Assy. RF Switch Box

340 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Oct 12, 2018 22:25 UTC

End recorded: Mar 14, 2020 19:16 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3337 LAM Research 853-017163-001 RF Switch Box

3337 LAM Research 853-017163-001 RF Switch Box

390 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Oct 12, 2018 21:25 UTC

End recorded: Mar 14, 2020 19:16 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working

Lam Research 4420 RF Switch Box 853-017163-001-D-3710 Used Working

403.12 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Mar 13, 2012 22:55 UTC

End recorded: Feb 14, 2020 06:45 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3337 LAM Research 853-017163-001 Assy. RF Switch Box

3337 LAM Research 853-017163-001 Assy. RF Switch Box

390 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Apr 18, 2017 17:14 UTC

End recorded: Oct 8, 2018 20:26 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3338 LAM Research 853-017163-001 Assy. RF Switch Box

3338 LAM Research 853-017163-001 Assy. RF Switch Box

340 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Apr 18, 2017 23:15 UTC

End recorded: Oct 8, 2018 20:21 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

3337 LAM Research 853-017163-001 Assy. RF Switch Box

3337 LAM Research 853-017163-001 Assy. RF Switch Box

390 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Nov 9, 2015 17:29 UTC

End recorded: Apr 17, 2017 01:18 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

No image available

3338 LAM Research 853-017163-001 Assy. RF Switch Box

340 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: Used

Listed: Nov 9, 2015 17:29 UTC

End recorded: Dec 9, 2015 17:29 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

LAM RESEARCH (LAM) 853-017163-001 LAM SWITCH BOX RF ASSY; 853-017163-001-F-C5

LAM RESEARCH (LAM) 853-017163-001 LAM SWITCH BOX RF ASSY; 853-017163-001-F-C5

650 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed

US

Condition: NEW

Listed: Dec 28, 2014 12:31 UTC

End recorded: Feb 27, 2015 20:04 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.