Lam Research (LAM) 853-017163-101 RF ASSY FilterLam Research (LAM) 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLam Research RF Filter ASSY. 853-017163-101LAM 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLAM 853-017163-101 RF ASSY FilterLAM RESEARCH (LAM) 853-017163-101    RF ASSY FilterLAM RESEARCH (LAM) 853-017163-101    RF ASSY FilterLAM RESEARCH (LAM) 853-017163-101    RF ASSY FilterLAM RESEARCH (LAM) 853-017163-101    RF ASSY FilterAMAT 853-017163-101  LAM 853-017163-101-3-C572;  RF ASSY FilterLam Research PN 853-017163-101 Rev 3 50 turn RF sense box Working
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LAM RESEARCH 853-017163-101

RF filter / RF sense box assembly

Market Availability & Pricing

Part number853-017163-101
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales244 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Filters
RF filter / RF sense box assembly
LAM RESEARCH853-017163-101RF filter assembly
Product description
Lam Research 853-017163-101 RF filter assembly / RF sense box, with 50-turn RF sense box wording.
Specifications and identifiers
fit notes
Critical RF factorsFrequency, impedance, connector type, turn count, and chamber RF subsystem match
supported details
Item typeRF assembly filter
Alternate wording50-turn RF sense box
Revision/exampleRev 3 / suffix 3-C572 mentioned
Applications
RF match systemsplasma RF sensingRF power filteringRF filter replacementRF sensing box serviceplasma RF subsystem maintenance
How it works

An RF filter or RF sense assembly conditions, filters, or senses RF signals in a plasma tool.

RF filter/sense hardware protects electronics and supports stable RF measurement or delivery.

Technical guide
RF

Radio frequency signal/power used in plasma generation and bias systems.

What to verify before purchase
  • Frequency and impedance
  • Connector type
  • Turn count
  • Revision/suffix
  • RF path location
Confirm with the seller
  • Power rating
  • Calibration
  • Compatibility with all Lam RF systems

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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