Product description
Lam Research 853-017423-002 coaxial cable assembly for RF match box connection.
Specifications and identifiers
rf notes
| RF-sensitive item | Connector and impedance dependent RF cables must match impedance, connector type, length, and power rating. |
|---|
supported identity
| Function | RF match box coax cable Carries RF power or RF signal between an RF match box and related RF hardware. |
|---|
| Cable type | Coaxial cable assembly Shielded RF cable with controlled impedance characteristics. |
|---|
| Location context | RF match box Reported application context; verify exact upper/lower/box routing. |
|---|
Equipment context
- Lam Research RF match subsystem
Applications
RF match networksplasma RF deliverysemiconductor etch/deposition toolsRF match box cable replacementCoax connection in RF power path
How it works
An RF coaxial cable assembly carries high-frequency energy or measurement signals with shielding and controlled impedance.
Incorrect RF cable length, connector type, or impedance can cause reflected power, matching errors, or arcing.
Technical guide
- RF
- Radio frequency.
- coax
- Coaxial cable; a center conductor surrounded by dielectric and shield.
What to verify before purchase
- Cable length and connector gender
- Impedance and power rating
- Routing position and revision
- Shield condition
Confirm with the seller
- Exact RF frequency/power rating
- Compatible match-box model
- Certified hipot/RF test status
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.