LAM RESEARCH RF MINI-MATCH 853-025083-001853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 RF MATCH ASSY LAM RESEARCH CORPORATION853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATIONLam Research P/N: 853-025083-001 / RF Mini-Match Assembly / Refurbished853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATIONLAM Research 853-025083-001 TCP BOTTOM MATCHERLAM RESEARCH 853-025083-001 TCP BOTTOM MATCHER853-025083-001 / RF MATCH ASSY / LAM RESEARCH CORPORATION 853-025083-001 /RF MATCH ASSY/ LAM RESEARCH CORPORATIONLam Research P/N: 853-025083-001 / RF MINI-MATCH ASSEMBLY / NEWLam Mini Match PN 853-025083-001
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LAM RESEARCH 853-025083-001

RF Mini-Match Assembly

Market Availability & Pricing

Part number853-025083-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales6498.03 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Match Networks
RF Mini-Match Assembly
LAM RESEARCH853-025083-001RF matching network assembly
Product description
RF Match Assembly / RF Mini-Match Assembly / TCP Bottom Matcher
Specifications and identifiers
observed identity
Component typeRF match assembly / mini-match
Listings consistently identify the item as an RF match or mini-match assembly.
Chamber/context termTCP bottom matcher mentioned
One listing ties it to a TCP bottom matcher context; verify specific chamber compatibility.
Condition examplesNew and refurbished mentioned
Condition is listing-specific and not inherent to the part identity.
Equipment context
  • Lam TCP bottom match context
Applications
plasma etch toolsLam TCP chamber RF systemssemiconductor RF power deliveryRF impedance matching for plasma chamberReplacement Lam RF mini-match assembly
How it works

An RF matching network adjusts impedance between an RF generator and plasma load so power transfers efficiently.

Mismatch can cause reflected power, unstable plasma, generator faults, and process repeatability issues.

Technical guide
RF
Radio frequency.
TCP
Transformer coupled plasma in Lam context, though exact platform compatibility is not confirmed.
matcher
Common shorthand for RF matching network.
What to verify before purchase
  • Confirm frequency, power rating, connector style, and tuning/control interface.
  • Verify TCP bottom matcher compatibility against tool BOM.
  • Inspect vacuum/RF connectors and tune mechanism condition.
Confirm with the seller
  • Exact frequency and power rating
  • Exact TCP chamber/platform compatibility
  • Internal tuning component condition

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH RF MINI-MATCH 853-025083-001

LAM RESEARCH RF MINI-MATCH 853-025083-001

USD 5000.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Aug 16, 2026 02:33 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:31 UTC

Availability has not been rechecked; current availability is unknown.

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