| Function | RF match / mini-match Repeated wording identifies RF matching function. |
|---|---|
| Position | lower Several descriptions call it lower RF match. |
| ESC context | ESC Associated with ESC RF matching. |
| Platform clue | 9600 Some descriptions reference 9600. |
An RF matching network or RF match assembly used between an RF generator and chamber load.
The match tunes impedance so RF power transfers efficiently into the process chamber instead of reflecting back to the generator.
A tunable or fixed impedance-matching assembly between generator and chamber.
Radio frequency power used to generate or bias plasma.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
No public documents were listed for this part when captured.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 17, 2026 16:05 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Oct 16, 2026 16:03 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBay0 matching listings.
No active-status direct listings are shown on this page.
Auction listing history. Direct marketplace listings are shown separately.
| Currency | Price basis | Records | Minimum | Maximum | Mean |
|---|---|---|---|---|---|
| USD | Observed public listing prices | 4 | 4211.1400 | 5393.9000 | 4799.7450000000000000 |
Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.
| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Aug 16, 2026 10:19 UTC | 853-025083-003 / RF MATCH, ASSY, LWR, ESC/ LAM RESEARCH CORPORATION | Completed listing price | 5198.94 (currency not captured) | Not established |
| Jun 17, 2026 10:17 UTC | 853-025083-003 / RF MATCH, ASSY, LWR, ESC/ LAM RESEARCH CORPORATION | Completed listing price | 5393.9 (currency not captured) | Not established |
| May 19, 2023 00:42 UTC | 853-025083-003 / RF MATCH, ASSY, LWR, ESC/ LAM RESEARCH CORPORATION | Completed listing price | 6498.67 (currency not captured) | Not established |
| Nov 28, 2021 02:45 UTC | Lam Research P/N: 853-025083-003 / RF Mini-Match Assembly / Refurbished | Completed listing price | 4500 (currency not captured) | Not established |
| Mar 4, 2021 15:57 UTC | Lam Research P/N: 853-025083-003 / 9600 RF Mini-Match Assembly / Refurbished | Completed listing price | 4298 (currency not captured) | Not established |
| Feb 22, 2021 17:00 UTC | Lam 853-025083-003 (mini-match) | Completed listing price | 3750 (currency not captured) | Not established |
| Nov 16, 2019 06:08 UTC | Lam 853-025083-003 (mini-match) | Completed listing price | 4000 (currency not captured) | Not established |
| Aug 20, 2019 01:38 UTC | LAM 853-025083-003 Refurbished w/3-month Warranty | Completed listing price | 3500 (currency not captured) | Not established |
| Aug 6, 2019 14:20 UTC | Lam Research P/N: 853-025083-003 / RF Mini-Match Assembly / Refurbished | Completed listing price | 4098 (currency not captured) | Not established |
| Jun 28, 2019 08:20 UTC | Lam Research P/N: 853-025083-003 / RF Mini-Match Assembly / Refurbished | Completed listing price | 4098 (currency not captured) | Not established |
| Mar 9, 2019 14:51 UTC | Lam Research P/N: 853-025083-003 / RF Mini-Match Assembly / Refurbished | Completed listing price | 4098 (currency not captured) | Not established |
| Jan 29, 2018 18:26 UTC | Lam Research P/N: 853-025083-003 / RF MINI-MATCH ESC / REFURBISHED | Completed listing price | 2400 (currency not captured) | Not established |
| Aug 8, 2017 22:36 UTC | Lam Research P/N: 853-025083-003 / Lower RF Mini-Match ESC | Completed listing price | 2400 (currency not captured) | Not established |
| Feb 11, 2017 05:27 UTC | Lam Research 853-025083-003 Core RF Match, ESC | Completed listing price | 200 (currency not captured) | Not established |
| Jun 10, 2016 23:48 UTC | Lam Research RF Mini Match 853-025083-003 | Completed listing price | 995 (currency not captured) | Not established |
Public listing prices, direct recorded sale prices and recorded accepted Best Offer amounts remain distinct. Quantities are source estimates. No aggregate sales total or average is inferred.
Prices and availability may change. Confirm details with the seller.
Observed public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 30, 2026 16:23 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayObserved public listing price, not an accepted sale amount.
eBay response captured — Checked Aug 29, 2026 16:03 UTC
Availability has not been rechecked; current availability is unknown.
Best Offer · Buy It Now
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
View on eBayOriginal public listing price is shown separately from recorded accepted amounts.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Aug 25, 2026 18:12 UTC.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
View on eBayLegacy public listing price; currency may not have been captured.
Legacy record; no enhanced status check captured
Check time or freshness is unknown; current availability is unknown.
Best Offer lookup was not verified; no accepted-price claim is made.
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