853-025903-002 | Lam Research Low Frequency AutoTune Sled AssemblyLAM RESEARCH P/N: 853-025903-002 LOW FREQUENCY AUTOTUNE T4-B10Lam Research P/N: 853-025903-002 / LOW FREQUENCY AUTO TUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE- FOR PARTS ONLYLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISHEDLam Research P/N: 853-025903-002 / ASSY, LOW FREQUENCY AUTOTUNE / REFURBISH
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LAM RESEARCH 853-025903-002

Low Frequency Autotune Assembly

Market Availability & Pricing

Part number853-025903-002
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › Matching Network Components
Low Frequency Autotune Assembly
LAM RESEARCH853-025903-002RF autotune assembly
Product description
Assembly, low frequency autotune; LOFAT/base-plate references
Specifications and identifiers
identification
Normalized item typeLow-frequency autotune assembly
RF/match-related autotune assembly.
rf attributes
Frequency contextLow frequency
Descriptor supported by supplied evidence.
Alternate descriptorLOFAT / base plate LOFAT
Likely shorthand for low-frequency autotune-related assembly; verify exact mechanical contents.
Applications
RF power deliveryplasma chambersmatching networksRF matching/autotune subsystemPlasma chamber RF power tuning
How it works

An RF matching or autotune-related assembly used to adjust impedance matching between an RF generator and chamber load.

Autotune hardware affects RF power transfer, plasma stability, and reflected-power behavior.

Technical guide
stainless steel

Corrosion-resistant metal commonly used in vacuum and gas-delivery hardware.

RF power control

Radio-frequency systems are used to generate and sustain plasma in etch/deposition chambers.

ESC
Electrostatic chuck or related wafer-clamping hardware.
RF
Radio frequency power or control used in plasma process equipment.
What to verify before purchase
  • Exact Lam tool and RF match model
  • Revision and tuning configuration
  • Whether base plate, full assembly, or partial assembly is included

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-025903-002 | Lam Research Low Frequency AutoTune Sled Assembly

853-025903-002 | Lam Research Low Frequency AutoTune Sled Assembly

USD 19995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 10, 2026 01:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

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