38862 LAM RESEARCH ASSY, TCP COIL, TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY TCP COIL TCCT 853-031436-11129496 LAM RESEARCH ASSY, TCP COIL, TCCT 853-031436-111
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LAM RESEARCH 853-031436-111

TCP Coil Assembly

Market Availability & Pricing

Part number853-031436-111
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales2500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Coils
TCP Coil Assembly
LAM RESEARCH853-031436-111TCP coil assembly
Product description
Assembly, TCP coil, TCCT
Specifications and identifiers
identification
Item typeTCP coil assembly
Coil contextTCP coil
Context termTCCT
Applications
Lam plasma etch chamberstransformer-coupled plasma systemsRF coil replacementRF plasma coil replacementetch chamber serviceplasma source maintenance
How it works

A TCP coil assembly is an RF/plasma coil used to couple energy into a plasma chamber.

Coil geometry, insulation, cooling, and revision are critical for plasma uniformity and tool performance.

Technical guide
TCP

Transformer Coupled Plasma, a method for inductively coupling RF energy into plasma.

TCCT
Context term present in provided evidence; exact expansion should be verified against Lam documentation.
What to verify before purchase
  • Verify coil geometry, revision, cooling/water connections if present, and matching chamber configuration.
  • Inspect ceramic/insulation condition and mounting features.
Confirm with the seller
  • Exact Lam platform/chamber compatibility is not confirmed.
  • Electrical/RF ratings are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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