38398 LAM RESEARCH RFRB, ASSY, TCP COIL, TCCT, LCLP (NEW) 853-031436-42538398 LAM RESEARCH RFRB, ASSY, TCP COIL, TCCT, LCLP (NEW) 853-031436-425Lam Research RFRB,TCP,ASSY,COIL,TCCT,LCLP 853-031436R425LAM RESEARCH 853-031436-425 ASSY TCP COIL, TCCT, LCLP 853-031436T425LAM RESEARCH 853-031436-425, 853-031436T425LAM RESEARCH 853-031436-425 ASSY TCP COIL, TCCT, LCLP 853-031436T425LAM RESEARCH 853-031436-425, 853-031436T425LAM RESEARCH 853-031436-425 ASSY TCP COIL, TCCT, LCLP 853-031436T425LAM RESEARCH 853-031436-425, 853-031436T425LAM RESEARCH 853-031436-425 ASSY TCP COIL, TCCT, LCLP 853-031436T425LAM RESEARCH 853-031436-425 ASSY TCP COIL, TCCT, LCLP
Image 1 of 11

LAM RESEARCH 853-031436-425

TCP Coil Assembly TCCT LCLP

Market Availability & Pricing

Part number853-031436-425
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales12000 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › TCP Coil Assemblies
TCP Coil Assembly TCCT LCLP
LAM RESEARCH853-031436-425TCP coil assembly
Product description
TCP coil assembly, TCCT / LCLP configuration, Lam Research part 853-031436-425
Specifications and identifiers
identification
Component formTCP coil assembly
Coil assembly associated with transformer-coupled plasma hardware.
Configuration termsTCCT, LCLP
Lam configuration terms requiring confirmation against tool documentation.
Variant references853-031436R425 and 853-031436T425 mentioned
Variant suffixes may represent revisions or alternate configurations.
Term observedRFRB
Likely an internal or vendor abbreviation; exact expansion not confirmed.
Applications
Lam plasma etch chambersTransformer-coupled plasma sourcesRF coil replacement and rebuildTCP source maintenanceRF coil assembly replacementPlasma chamber rebuild
How it works

A TCP coil assembly is an RF coil used to couple energy into a plasma source in transformer-coupled plasma equipment.

The coil geometry and condition affect plasma coupling, uniformity, and RF power behavior.

Technical guide
TCP

Transformer-coupled plasma; an inductively coupled plasma source architecture.

What to verify before purchase
  • Confirm exact suffix/version: -425, R425, or T425.
  • Inspect coil condition, insulation, cooling passages if present, and mounting hardware.
  • Verify TCCT/LCLP chamber configuration before purchase.
Confirm with the seller
  • Exact Lam tool model and coil revision are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

No available listings found for this search.

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.