Product description
TCP coil assembly, TCCT / LCLP configuration, Lam Research part 853-031436-425
Specifications and identifiers
identification
| Component form | TCP coil assembly Coil assembly associated with transformer-coupled plasma hardware. |
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| Configuration terms | TCCT, LCLP Lam configuration terms requiring confirmation against tool documentation. |
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| Variant references | 853-031436R425 and 853-031436T425 mentioned Variant suffixes may represent revisions or alternate configurations. |
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| Term observed | RFRB Likely an internal or vendor abbreviation; exact expansion not confirmed. |
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Applications
Lam plasma etch chambersTransformer-coupled plasma sourcesRF coil replacement and rebuildTCP source maintenanceRF coil assembly replacementPlasma chamber rebuild
How it works
A TCP coil assembly is an RF coil used to couple energy into a plasma source in transformer-coupled plasma equipment.
The coil geometry and condition affect plasma coupling, uniformity, and RF power behavior.
Technical guide
TCP
Transformer-coupled plasma; an inductively coupled plasma source architecture.
What to verify before purchase
- Confirm exact suffix/version: -425, R425, or T425.
- Inspect coil condition, insulation, cooling passages if present, and mounting hardware.
- Verify TCCT/LCLP chamber configuration before purchase.
Confirm with the seller
- Exact Lam tool model and coil revision are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.