LAM Research 853-031550-001 MCG 41-M2900 Assembly Motor RF GAPLam Research 853-031550-001 Variable Gap Drive Assembly for LAM 9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM 9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM 9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam Research 853-031550-001 Variable Gap Drive Assembly for LAM9600 As-IsLam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614Lam 853-031550-001 Variable Gap Drive Assembly 4 LAM9600 w/ 853-011141-003-0614
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LAM RESEARCH 853-031550-001

Variable Gap Drive Assembly

Market Availability & Pricing

Part number853-031550-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales400 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Motion & Drive Assemblies › Gap Drive Assemblies
Variable Gap Drive Assembly
LAM RESEARCH853-031550-001Drive Assembly
Product description
Variable gap drive / motor RF gap assembly for Lam 9600 context
Specifications and identifiers
identified features
Assembly typeVariable gap drive assembly
Motor/contextMCG 41-M2900 motor RF gap context appears in evidence
Platform contextLam 9600
Equipment context
  • Lam 9600
Applications
gap adjustmentindexinglift or positioning mechanismsVariable gap positioningRF/electrode gap drive serviceLam 9600 motion assembly replacement
How it works

A mechanical/electromechanical drive assembly used to move or position a tool mechanism.

Drive assemblies influence alignment, repeatability, and motion reliability inside wafer-processing equipment.

Technical guide
motorized_positioning

Motors, shafts, gears, and linkages may translate controller commands into mechanical motion.

variable_gap
A mechanism that adjusts spacing between related process-tool components.
What to verify before purchase
  • Confirm motor model and included linkage/coupling hardware
  • Verify revision and platform-specific fit
  • Inspect bearings, shaft play, and mechanical travel
Confirm with the seller
  • Exact chamber module
  • Calibration procedure

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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