Lam Research LAM 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLam Research TCP Upper Match 853-031685-001 Lam Research TCP Upper Match 853-031685-001 Lam Research TCP Upper Match 853-031685-001 Lam Research TCP Upper Match 853-031685-001 Lam Research TCP Upper Match 853-031685-001 Lam Research TCP Upper Match 853-031685-001 LAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCHLAM RESEARCH 853-031685-001 LAM 9600 TCP MATCH
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LAM RESEARCH 853-031685-001

Lam 9600 TCP upper RF match

Market Availability & Pricing

Part number853-031685-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales395 (currency not captured) — public listing price; reported sold quantity is not a verified transaction. Recorded acceptance: Accepted price not disclosed
Electrical › RF Power › RF Match Networks
Lam 9600 TCP upper RF match
LAM RESEARCH853-031685-001RF match network
Product description
Lam Research 853-031685-001 TCP upper match / Lam 9600 TCP match assembly.
Specifications and identifiers
rf details
FunctionTCP upper match
RF match network associated with a TCP source or upper RF path.
Platform referenceLam 9600
Platform reference appears consistently in the descriptions.
Assembly typeRF match assembly
Tunes RF impedance between generator and plasma load.
Equipment context
  • Lam 9600 TCP
Applications
Lam TCP plasma systemsupper RF power pathLam 9600 RF subsystemTCP RF match replacementupper RF match serviceplasma source RF tuning
How it works

An RF match network tunes impedance in the RF power path of a plasma chamber.

In TCP systems, the match is essential for stable power transfer and reduced reflected power.

Technical guide
TCP

Transformer coupled plasma, a plasma source architecture used in etch tools.

match
RF matching network.
What to verify before purchase
  • Verify revision, connector type, cooling, match control interface, and whether it is the upper match for the target chamber.
  • Confirm fit against the Lam 9600/TCP BOM.
Confirm with the seller
  • Exact electrical rating is not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research LAM 853-031685-001 LAM 9600 TCP MATCH

Lam Research LAM 853-031685-001 LAM 9600 TCP MATCH

USD 4999.9500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Sep 24, 2024 01:02 UTC
End recorded: Dec 6, 2024 22:22 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 8, 2026 16:14 UTC

Availability has not been rechecked; current availability is unknown.

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