13380 LAM RESEARCH TCP 9600 UPPER RF MATCH W/O CAPACITOR,MTR,GEAR 853-032190-008Lam Research P/N: 853-032190-008 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-008 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-008 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-008 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research TCP9600 Upper RF Match 853-032190-008Lam Research P/N: 853-032190-008 / TCP9600 UPPER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-008 TCP 9600 UPPER RF MATCH ASSEMBLYLam Research P/N: 853-032190-008 TCP 9600 UPPER RF MATCH ASSEMBLYLam Research TCP9600 Upper RF Match 853-032190-008 853-032190R-008Lam Research TCP 9600 Upper RF Match 853-032190-008 AssemblyLam Research TCP 9600 Upper RF Match 853-032190-008 AssemblyLam Research TCP9600 Upper RF Match 853-032190-008Lam Research TCP9600 RF Match 853-032190-008
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LAM RESEARCH 853-032190-008

TCP 9600 Upper RF Match Assembly

Market Availability & Pricing

Part number853-032190-008
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales17995 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Matching Networks
TCP 9600 Upper RF Match Assembly
LAM RESEARCH853-032190-008RF match assembly
Product description
TCP 9600 Upper RF Match Assembly
Specifications and identifiers
evidence backed details
Supported descriptionTCP 9600 Upper RF Match Assembly
Normalized from repeated listing-title evidence.
PlatformTCP 9600
PositionUpper / main chamber RF match
Evidence count9
Number of listing-title sources provided in the request.
Equipment context
  • TCP 9600
Applications
etch chambersPVD chambersplasma process modulesetch chambersPVD chambersplasma process modules
How it works

An RF matching network couples RF generator power into a plasma load by tuning impedance.

A wrong match network can cause reflected power, plasma instability, or generator faults.

Technical guide
RF
Radio frequency; commonly used for plasma power delivery.
What to verify before purchase
  • Confirm exact revision and dash/variant number against the installed assembly.
  • Verify physical dimensions, material/coating, connector/port style, and cleanliness/condition.
  • Check whether the listing is for the complete assembly or only a subcomponent.
Confirm with the seller
  • Exact OEM bill-of-material relationship beyond the listing-title evidence.
  • Tool/chamber compatibility unless specifically named in the provided evidence.
  • Electrical ratings, pressure ratings, coating thickness, or material grade unless stated in the title evidence.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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