Lam Research P/N: 853-032190-306 / MAIN CHAMBER RF MATCH LAM 9600 / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research TCP Upper Match 853-032190-306 RefurbishedLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / 9600 MAIN CHAMBER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research TCP9600 Upper RF Match 853-032190-306Lam Research TCP9600 Upper RF Match 853-032190-306Lam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research TCP9600 Upper RF Match 853-032190-306LAM RESEARCH 853-032190-306 TCP9600 ASSY UPPER RF MATCH F/G 6 TURN COILLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research 853-032190-306 RF MATCH 9600 AssemblyLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLam Research P/N: 853-032190-306 / RF MATCH 9600 ASSEMBLY / REFURBISHEDLAM RESEARCH (LAM) 853-032190-306 ASSY UPPER RF MATCH F/G 6 TURN COIL-Untested aLam Research P/N: 853-032190-306 / TCP9600 UPPER RF MATCH / REFURBISHEDLam Research P/N: 853-032190-306 TCP 9600 UPPER RF MATCH ASSEMBLYLam Research P/N: 853-032190-306 TCP 9600 UPPER RF MATCH ASSEMBLYLAM RESEARCH TCP9600 UPPER RF MATCH , P/N : 853-032190-306 , SEE DETAIL
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LAM RESEARCH 853-032190-306

Upper RF Match Assembly

Market Availability & Pricing

Part number853-032190-306
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales17995 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Match Networks
Upper RF Match Assembly
LAM RESEARCH853-032190-306RF match assembly
Product description
TCP9600 upper RF match assembly, F/G 6-turn coil context
Specifications and identifiers
observed evidence
Evidence phraseUpper RF match
Repeated or directly stated in provided listing evidence.
Evidence phraseTCP9600 / 9600
Repeated or directly stated in provided listing evidence.
Evidence phraseF/G 6 turn coil
Repeated or directly stated in provided listing evidence.
Related markings/models seenTCP9600, TCP 9600, MATCH 9600, LAM 9600
Listing title markings that may identify OEM subcomponents, revisions, or related assemblies; verify on the actual item.
Equipment context
  • TCP9600
  • Lam 9600
Applications
Plasma process powerRF matching networksSemiconductor etch/deposition toolsRF matching networkMain chamber RF match
How it works

RF power hardware supplies or matches radio-frequency energy for plasma/process chambers.

Frequency, power rating, impedance matching, cooling, connectors, and tool interface must match the chamber and generator configuration.

Technical guide
RF

Radio-frequency process power context; RF compatibility is tool and load dependent.

What to verify before purchase
  • Confirm exact revision/suffix and OEM markings.
  • Verify fit and compatibility against the tool BOM or removed part.
  • Check condition, test status, and whether accessories/cables are included.
  • Verify connector style, firmware/configuration, input/output ratings, and bus/interface requirements.
Confirm with the seller
  • Exact OEM compatibility beyond provided title evidence
  • Current working condition unless explicitly tested
  • Revision interchangeability

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research P/N: 853-032190-306 / MAIN CHAMBER RF MATCH LAM 9600 / REFURBISHED

Lam Research P/N: 853-032190-306 / MAIN CHAMBER RF MATCH LAM 9600 / REFURBISHED

USD 17995.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jun 22, 2024 01:02 UTC
End recorded: Dec 7, 2024 12:11 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 7, 2026 16:03 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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