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LAM Research 853-032983-002

Heated Isolation Angle Valve Assembly

Market Availability & Pricing

Part number853-032983-002
ManufacturerLAM Research
Current availabilitySee listings below
Latest completed listing with reported sales375 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Vacuum › Valves & Flow Control › Vacuum Valves
Heated Isolation Angle Valve Assembly
LAM Research853-032983-002heated isolation angle valve assembly
Product description
Assembly, Heated Isolation Angle Valve
Specifications and identifiers
observed identity
Component typeHeated isolation angle valve assembly
Both provided titles identify heated isolation angle valve assembly.
HeatingHTD / heated
The assembly is explicitly described as heated.
Manufacturer mismatch in one titleOne listing says AMAT but part is Lam Research
This appears likely listing noise; manufacturer in request remains Lam Research.
Applications
heated process linesvacuum isolationLam Research chamber/service plumbingHeated vacuum line isolationReplacement heated angle valve assembly
How it works

A heated isolation angle valve isolates a vacuum or process line while maintaining elevated temperature to reduce condensation or deposition.

Valve fit, seal type, actuation, heater voltage, and temperature control are all critical for replacement.

Technical guide
heated valve

A valve with integrated heating to control condensation/deposition or maintain process conditions.

ASSY
Assembly.
HTD
Heated.
P/N
Part number.
PCB
Printed circuit board.
Rev
Revision level; match for replacement.
What to verify before purchase
  • Confirm manufacturer label and exact Lam part number.
  • Verify heater voltage, connector, actuation type, and flange/fitting interfaces.
  • Inspect valve sealing and heater continuity.
Confirm with the seller
  • Exact valve OEM
  • Port/flange size
  • Heater rating

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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