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LAM RESEARCH 853-036804-004

optical sensor assembly for prime movers/BSR

Market Availability & Pricing

Part number853-036804-004
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales150 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Optical › Sensors & Detection › Optical Sensors
optical sensor assembly for prime movers/BSR
LAM RESEARCH853-036804-004optical sensor assembly
Product description
Lam Research optical sensor assembly for prime movers / BSR context.
Specifications and identifiers
supported details
FunctionOptical sensor assembly
Sensor assembly used for position, presence, or motion detection.
Application wordingPrime MVRS/BSR
Supported context wording; exact subsystem meaning should be verified.
Applications
wafer handling feedbackmotion subsystem sensingequipment interlocksOptical sensor replacementMotion or presence-detection troubleshooting
How it works

An optical sensor assembly used to detect position, presence, or movement in a tool subsystem.

Optical sensors support reliable automation, motion limits, and state feedback.

Technical guide
sensor_assembly

May include emitter/receiver optics, cables, brackets, and electronics; exact construction is not confirmed.

optical_sensing

Uses light to detect object presence, position, or transitions.

BSR
Subsystem/context abbreviation not expanded from provided evidence.
Opt SNSR
Optical sensor.
What to verify before purchase
  • Confirm what Prime MVRS/BSR means for the target tool.
  • Confirm cable length, connector, and mounting geometry.
Confirm with the seller
  • Exact tool serial compatibility is not confirmed.
  • Operating condition and calibration status are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

LAM RESEARCH SENSOR ASSY 853-036804-004

LAM RESEARCH SENSOR ASSY 853-036804-004

USD 1200.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jan 22, 2026 01:31 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
37038 LAM RESEARCH SENSOR ASSY 853-036804-004

37038 LAM RESEARCH SENSOR ASSY 853-036804-004

USD 589.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Feb 25, 2025 03:51 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 11, 2026 16:07 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research  OPT Sensor Prime Mover 853-036804-004 (As-Is)

Lam Research OPT Sensor Prime Mover 853-036804-004 (As-Is)

USD 590.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Feb 15, 2024 00:01 UTC
End recorded: Dec 7, 2024 13:40 UTC
Estimated remaining at check: 24
Estimated sold at check: 0

eBay response captured — Checked Oct 5, 2026 16:12 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Lam Research OPT Sensor Prime Mover 853-036804-004 (As-Is)

Lam Research OPT Sensor Prime Mover 853-036804-004 (As-Is)

USD 472.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Mar 8, 2023 02:31 UTC
End recorded: Dec 7, 2024 05:43 UTC
Estimated remaining at check: 2
Estimated sold at check: 1

eBay response captured — Checked Oct 1, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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