853-040482R301 LAM RESEARCH RF MATCH 853-040482-301Lam Research Brand New 853-040482-301 RF Matcher US Stock Fast Free ShippingLAM Research 853-040482-301 RF Match Flex 45 LAM Research 853-040482-301 RF Match Flex 45 *new surplus Lam Research Used 853-040482-301 Rev:M RF Matcher SEM-I-193=6B52RF MATCH, LAM, RFRB-ENCL MATCH, 853-040482-301Lam Research RF Match 853-040482-301LAM Match 853-040482-301 / Free international Shipping Lam Research Used 853-040482-301 Rev:M RF Matcher SEM-I-193=6B52Lam Research AUTOMATCH Used 853-040482-301 Rev:M SEM-I-194=6B52LAM Match 853-040482-301 / Free international Shipping LAM RESEARCH 853-040482-301 MATCH ENCLOSURE , LWR, 2-27-60MHz, 300853-040482-301 /RF AUTOMATCH / LAMLAM Research 853-040482-301 RF AUTOMATCHLam Research 853-040482R301 RF Match Unit 853-040482-301
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LAM RESEARCH 853-040482-301

RF Automatch

Market Availability & Pricing

Part number853-040482-301
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales12500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › Matching Networks
RF Automatch
LAM RESEARCH853-040482-301RF match network
Product description
RF automatch / RF match network, Flex 45 context, for Lam Research equipment.
Specifications and identifiers
identified features
ComponentRF automatch / RF match
RF matching network used between RF generator and chamber load.
ContextFlex 45
Lam context indicated in descriptions; verify exact platform/module.
Frequency context2-27-60 MHz in one description
Frequency wording should be verified on the label or datasheet.
Revision notedRev M in multiple descriptions
Revision matters for interchangeability.
Equipment context
  • Lam Flex 45 context
Applications
plasma etch systemsRF power deliveryLam RF automatch modulesRF power matchingplasma chamber RF subsystemautomatch replacement
How it works

An RF matching network automatically tunes impedance between an RF generator and the plasma/chamber load.

Correct match networks protect the RF generator and help maintain stable plasma power delivery.

Technical guide
impedance_matching

RF matching adjusts capacitance/inductance so power transfers efficiently into the plasma load.

Automatch
Automatic impedance matching network.
RF
Radio frequency.
What to verify before purchase
  • Confirm revision and frequency range from the nameplate.
  • Verify connector style and cooling/interlock requirements.
  • Check whether enclosure/cables are included.
Confirm with the seller
  • Exact frequency range
  • power rating
  • full tool compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-040482R301 LAM RESEARCH RF MATCH 853-040482-301

853-040482R301 LAM RESEARCH RF MATCH 853-040482-301

USD 2499.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Jul 25, 2025 23:46 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:25 UTC

Availability has not been rechecked; current availability is unknown.

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