Lam Research PN: 853-064887-006 13.56 MHz RF Source UnitLam Research PN: 853-064887-006 13.56 MHz RF Source UnitLam Research PN: 853-064887-006 13.56 MHz RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLAM Research RF Enclosure Assembly w/ 853-064887-006 Source Unit ModuleLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source UnitLam Research 853-064887-006 208V 13.56MHz Radio Frequency RF Source Unit
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LAM RESEARCH 853-064887-006

208V 13.56MHz RF Source Unit

Market Availability & Pricing

Part number853-064887-006
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales82.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
208V 13.56MHz RF Source Unit
LAM RESEARCH853-064887-006RF source unit
Product description
13.56 MHz RF source unit; listings identify 208V radio frequency RF source unit
Specifications and identifiers
evidence terms
FunctionRF Source Unit
Repeated listing wording.
Frequency13.56 MHz
Repeated in listing titles.
Input voltage208V
Appears in multiple titles.
System roleRadio Frequency source
Identifies RF power delivery function.
Applications
Lam plasma process toolsRF power delivery systemsSemiconductor etch/deposition equipmentRF power source replacementPlasma process RF generation
How it works

An RF source unit generates radio-frequency power for plasma processing or related RF-driven subsystems.

Frequency, input voltage, output power, cooling, and connector compatibility are critical for safe and correct operation.

Technical guide
13.56 MHz

A common industrial RF frequency used in plasma processing.

RF source

Generator/source that supplies RF power to a match network or load.

RF
Radio frequency.
What to verify before purchase
  • Confirm output power rating from nameplate.
  • Verify cooling method and connectors.
  • Match input voltage and control interface.
Confirm with the seller
  • Output power rating
  • Exact compatible Lam platform
  • Control interface details

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research PN: 853-064887-006 13.56 MHz RF Source Unit

Lam Research PN: 853-064887-006 13.56 MHz RF Source Unit

USD 899.9900

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Aug 29, 2017 22:36 UTC
End recorded: Dec 7, 2024 02:56 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 19, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

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