✅ LAM Research MHz RF Source Unit 853-064887-010 VENDOR CODE 1033341 REV.GLam Research 853-064887-010 RF Source Match Unit Working SurplusFactory Sealed Lam Research 853-064887-010 US Spot Free Shipping Via UPSLam Research Brand New 853-064887-010 RF Power Supply US Stock Fast Free Ship1PCS Lam Research RF Matcher, 853-064887-010 /hyy✅ LAM Research MHz RF Source Unit 853-064887-010 VENDOR CODE 1033341 REV.GLAM Research MHz RF Source Unit 853-064887-010 VENDOR CODE 1033341 REV.GAs-Is Lam 853-064887-010LAM 853-064887-010 13.56 MHz RF Source UnitLam Research MHz RF Source Unit 853-064887-010Lam Research MHz RF Source Unit 853-064887-010Lam Research Brand New 853-064887-010 RF Power Supply US Stock Fast Free ShipLam Research Brand New 853-064887-010 RF Power Supply US Stock Fast Free Ship
Image 1 of 13

LAM RESEARCH 853-064887-010

Lam 13.56 MHz RF Source Unit

Market Availability & Pricing

Part number853-064887-010
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales1900 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Lam 13.56 MHz RF Source Unit
LAM RESEARCH853-064887-010RF source unit
Product description
Lam Research 853-064887-010 RF source unit / RF source-match unit, identified with 13.56 MHz RF source wording and vendor code 1033341 Rev G references.
Specifications and identifiers
identification
FunctionRF source unit
Frequency13.56 MHz
Associated referenceVendor code 1033341 Rev G
Applications
etch toolsCVD/PVD plasma chambersRF source or match subsystemsRF source replacementPlasma source power deliveryLam RF subsystem service
How it works

An RF power, RF source, or RF matching component used in plasma process equipment.

Frequency, power rating, impedance matching, cooling, and interface compatibility affect plasma stability and equipment safety.

What to verify before purchase
  • Verify whether the item is RF source, RF match, or combined source/match configuration
  • Confirm frequency, power rating, cooling, and interlock interfaces
  • Check revision and service/test status
Confirm with the seller
  • Exact power rating is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

✅ LAM Research MHz RF Source Unit 853-064887-010 VENDOR CODE 1033341 REV.G

✅ LAM Research MHz RF Source Unit 853-064887-010 VENDOR CODE 1033341 REV.G

USD 1900.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
IL
Condition: Used
Listed: Jan 25, 2026 11:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:17 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay
Lam Research 853-064887-010 RF Source Match Unit Working Surplus

Lam Research 853-064887-010 RF Source Match Unit Working Surplus

USD 1512.2400

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 17, 2024 14:40 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 10, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

Direct marketplace listings

0 matching listings.

No active-status direct listings are shown on this page.

Marketplace search uses listing titles and service keywords, with quoted phrases and -excluded terms.