Lam Research  P/N: 853-090221-001 / AutoEtch Gap Adjust Sprocket / NewLam Research AutoEtch P/N: 853-090221-001 / Gap Adjust Sprocket Assembly / NEW Lam Research AutoEtch P/N: 853-090221-001 / Gap Adjust Sprocket Assembly / NEW 18143 LAM RESEARCH ASSY AUTORTCH GAP ADJUST SPROCKET (NEW) 853-090221-001Lam Research  P/N: 853-090221-001 / AutoEtch Gap Lead Screw & Sprocket / NEW Lam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketLam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketLam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketLam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketLam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketLam Research P/N: 853-090221-001 / Assembly AutoEtch 490/590 Gap Adjust SprocketSemigroup / LAM Research 853-090221-001  490 Sprocket Assy. WE R308-0040
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LAM RESEARCH 853-090221-001

AutoEtch Gap Adjust Sprocket Assembly

Market Availability & Pricing

Part number853-090221-001
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales785 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Wafer Handling › Lift & Gap Mechanisms
AutoEtch Gap Adjust Sprocket Assembly
LAM RESEARCH853-090221-001Gap adjust sprocket assembly
Product description
Lam Research 853-090221-001 AutoEtch gap-adjust sprocket / lead-screw and sprocket assembly, including AutoEtch 490/590 context.
Specifications and identifiers
identification
DescriptionGap adjust sprocket assembly
Additional wordingGap lead screw and sprocket
Platform contextAutoEtch 490/590
Equipment context
  • Lam Research AutoEtch 490/590
Applications
wafer lift mechanismsgate or gap adjustment mechanismschamber hardware assembliesAutoEtch gap adjustmentMechanical gap/spacing serviceLead screw and sprocket replacement
How it works

A mechanical assembly or hardware component used in wafer handling, chamber motion, or tool support structures.

Dimensions, revision, material, wear, and installation location must match the tool to avoid interference or handling faults.

What to verify before purchase
  • Verify sprocket/lead-screw configuration
  • Inspect teeth, shaft, and bearing surfaces
  • Confirm AutoEtch model compatibility
Confirm with the seller
  • Exact tool/chamber compatibility is not confirmed

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam Research  P/N: 853-090221-001 / AutoEtch Gap Adjust Sprocket / New

Lam Research P/N: 853-090221-001 / AutoEtch Gap Adjust Sprocket / New

USD 785.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Sep 30, 2023 01:00 UTC
End recorded: Dec 7, 2024 05:10 UTC
Estimated remaining at check: 4
Estimated sold at check: 0

eBay response captured — Checked Oct 3, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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