Product description
Heated paddle feedthrough assembly, STPR, 6 in; Lam Research 853-347146-006.
Specifications and identifiers
identification
| Part description | Heated paddle feedthrough assembly This is the supported identity for the part. |
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| Size | 6 inch This is a key supported specification. |
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| Abbreviations | HTD/PDL/FDTHRU/STPR Expanded conservatively as heated/paddle/feedthrough; STPR should be verified. |
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Applications
Lam Research chamber hardwareheated process components6-inch process modulesheated feedthrough process hardware6-inch Lam Research chamber assemblies
How it works
A heated paddle assembly with feedthrough-related function for a 6-inch Lam Research configuration.
Heated paddles and feedthroughs can be process-exposed and require exact thermal, dimensional, and seal compatibility.
Technical guide
- FDTHRU
- Feedthrough.
- HTD
- Heated.
- STPR
- Likely stepper/station/process shorthand; verify exact OEM meaning.
What to verify before purchase
- heater rating and connector type
- feedthrough seal condition
- exact STPR application
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.