853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP. LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6'' Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006 LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6'' 853-347146-006 / ASSY, HTD PDL, FDTHRU. STPR, 6IN / LAM RESEARCH CORPORATION

LAM RESEARCH 853-347146-006

6 in Heated Paddle Feedthrough Assembly

Market Availability & Pricing

wSemi tracks marketplace activity for LAM RESEARCH 853-347146-006. Current records show 2 active listings and 12 historical observations.

Current availability 2 active
Verified eBay availability 0 verified active
Legacy active records 2 awaiting/retrying verification
Listings tracked 14 tracked
First seen Mar 30, 2021
Most recent Dec 1, 2025
Latest sold listing price $10,500.00 Dec 1, 2025 · Public eBay listing price; an accepted Best Offer may differ
Mechanical › Chamber Components › Heated Components
6 in Heated Paddle Feedthrough Assembly
LAM RESEARCH 853-347146-006 heated paddle feedthrough assembly
↓ Listings
Product description
Heated paddle feedthrough assembly, STPR, 6 in; Lam Research 853-347146-006.
Specifications and identifiers
Identification
Part description Heated paddle feedthrough assembly
Size 6 inch
Abbreviations HTD/PDL/FDTHRU/STPR
Applications
Lam Research chamber hardwareheated process components6-inch process modulesheated feedthrough process hardware6-inch Lam Research chamber assemblies
How it works

A heated paddle assembly with feedthrough-related function for a 6-inch Lam Research configuration.

Heated paddles and feedthroughs can be process-exposed and require exact thermal, dimensional, and seal compatibility.

Technical guide
HTD
Heated.
FDTHRU
Feedthrough.
STPR
Likely stepper/station/process shorthand; verify exact OEM meaning.
What to verify before purchase
  • heater rating and connector type
  • feedthrough seal condition
  • exact STPR application
Confirm with the seller
  • exact Lam tool model
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.
14 listings tracked 2 active 4 estimated eBay units sold 12 completed
Mar 30, 2021
First Seen
Dec 1, 2025
Most Recent
$7,061.54
Average Observed Price
N/A
Latest Sale Activity
No sales found

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Price History (Last 50 Items)

Related Part Numbers

853-347146-008 853-347147-006 853-347014-006 853-347147-008 853-034016-003 853-034136-002 853-347019-605 853-034014-001 853-347068-001 853-347068-002 853-244147-004 853-244147-003

💡 Market Summary

Our comprehensive database contains 14 total listings for part number 853-347146-006 from LAM RESEARCH. Currently, there are 2 active listings available for purchase. Historical data for this part extends back to March 2021, with the most recent activity on December 1, 2025.

Observed listing prices average $7,061.54, ranging from $150.00 to $15,999.00. Market activity shows 12 completed listings, with eBay reporting an estimated 4 units sold. Whether you're looking to buy or sell, this historical data can help you understand current market conditions and pricing trends for this part.

Available Listings

Current and Historical Listings (14 Total)
Affiliate Disclosure: We may earn a commission from qualifying purchases made through eBay or other merchant links on this page, at no extra cost to you.

Available Listings

853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP.
853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP.
Listed: Dec 1, 2025
● Active United States
Legacy record. This active listing has not yet received an enhanced status check.
LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''
LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''
Listed: Jul 18, 2023
● Active United States
Legacy record. This active listing has not yet received an enhanced status check.

Historical Market Records

853-347146-006 / ASSY, HTD PDL, FDTHRU. STPR, 6IN / LAM RESEARCH CORPORATION
853-347146-006 / ASSY, HTD PDL, FDTHRU. STPR, 6IN / LAM RESEARCH CORPORATION
Start: Sep 29, 2022
End: Dec 1, 2025
Sold: 1
Completed United States
$10,500.00
LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''
LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''
Start: Jul 18, 2023
End: Oct 12, 2023
Sold: 0
Completed United States
$13,599.00
LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''
LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''
Start: Mar 30, 2021
End: Jan 30, 2023
Sold: 0
Completed United States
$15,999.00
LAM RESEARCH 853-347146-006 ASSY HTD PDL FTHRU STPR 6''
LAM RESEARCH 853-347146-006 ASSY HTD PDL FTHRU STPR 6''
Start: Mar 30, 2021
End: Jan 30, 2023
Sold: 0
Completed United States
$15,999.00
LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''
LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''
Start: Mar 30, 2021
End: Jan 30, 2023
Sold: 0
Completed United States
$15,999.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Apr 19, 2022
End: Apr 21, 2022
Sold: 1
Completed United States
$250.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Mar 26, 2022
End: Apr 18, 2022
Sold: 1
Completed United States
$250.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Mar 13, 2022
End: Mar 20, 2022
Sold: 1
Completed United States
$150.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Mar 6, 2022
End: Mar 13, 2022
Sold: 0
Completed United States
$150.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Feb 27, 2022
End: Mar 6, 2022
Sold: 0
Completed United States
$150.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Feb 20, 2022
End: Feb 27, 2022
Sold: 0
Completed United States
$150.00
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
Start: Feb 13, 2022
End: Feb 20, 2022
Sold: 0
Completed United States
$150.00

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