853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP.LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''853-347146-006 / ASSY, HTD PDL, FDTHRU. STPR, 6IN / LAM RESEARCH CORPORATIONLAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''LAM RESEARCH 853-347146-006 ASSY HEATED PADDLE FEEDTHRU STRP 6''LAM RESEARCH 853-347146-006 ASSY HTD PDL FTHRU STPR 6''LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006Lam Research 715-032756-001/715-032755-002 6" Heated Paddle Assy 853-347146-006
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LAM RESEARCH 853-347146-006

6 in Heated Paddle Feedthrough Assembly

Market Availability & Pricing

Part number853-347146-006
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales10500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Mechanical › Chamber Components › Heated Components
6 in Heated Paddle Feedthrough Assembly
LAM RESEARCH853-347146-006heated paddle feedthrough assembly
Product description
Heated paddle feedthrough assembly, STPR, 6 in; Lam Research 853-347146-006.
Specifications and identifiers
identification
Part descriptionHeated paddle feedthrough assembly
This is the supported identity for the part.
Size6 inch
This is a key supported specification.
AbbreviationsHTD/PDL/FDTHRU/STPR
Expanded conservatively as heated/paddle/feedthrough; STPR should be verified.
Applications
Lam Research chamber hardwareheated process components6-inch process modulesheated feedthrough process hardware6-inch Lam Research chamber assemblies
How it works

A heated paddle assembly with feedthrough-related function for a 6-inch Lam Research configuration.

Heated paddles and feedthroughs can be process-exposed and require exact thermal, dimensional, and seal compatibility.

Technical guide
FDTHRU
Feedthrough.
HTD
Heated.
STPR
Likely stepper/station/process shorthand; verify exact OEM meaning.
What to verify before purchase
  • heater rating and connector type
  • feedthrough seal condition
  • exact STPR application
Confirm with the seller
  • exact Lam tool model

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP.

853-347146-006 / ASSY, HEATED PADDLE, FDTHRU. STPR, 6IN / LAM RESEARCH CORP.

USD 9516.5600

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 1, 2025 20:19 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 14, 2026 16:04 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''

LAM RESEARCH 853-347146-006 ASSY, HTD PDL, FDTHRU, STPR 6''

USD 15999.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: NEW
Listed: Jul 18, 2023 21:00 UTC
End recorded: Dec 7, 2024 03:25 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 2, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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