25695 LAM RESEARCH ENDPOINT DETECTOR 853-540066-005US Spot Inventory 853-540066-005 Lam Research One-Year Warranty New In BoxLAM RESEARCH 853-540066-005 Electronic Component Module New Sealed US Stock25695 LAM RESEARCH ENDPOINT DETECTOR 853-540066-005LAM Research 853-540066-005 Industrial End-Point Detector Module AS-ISLAM Research 853-540066-005 Rev.F Industrial End-Point Detector Module2545 LAM RESEARCH ENDPOINT DETECTOR 853-540066-005LAM Research 853-540066-005 Rev.F Industrial End-Point Detector Module #2LAM Research 853-540066-005 Industrial End-Point Detector Module AS-ISLAM Research 853-540066-005 Rev.F Industrial End-Point Detector ModuleLAM Research 853-540066-005 Rev.F Industrial End-Point Detector Module #2Lam Research OnTrak 853-540066-005 - ASSY END PT DETLAM RESEARCH 9400 PTX END POINT DETECTOR ASSY 853-540066-005LAM RESEARCH 9400 PTX END POINT DETECTOR ASSY 853-540066-005Lam Research Refurb end point detector 9400DFM/PTX 853-540066-005LAM RESEARCH 9400 PTX END POINT DETECTOR ASSY 853-540066-005LAM RESEARCH 853-540066-005 Electronic Component Module New Sealed US Stock
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LAM RESEARCH 853-540066-005

endpoint detector assembly

Market Availability & Pricing

Part number853-540066-005
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales719.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Optical › Sensors & Detection › Endpoint Detection Modules
endpoint detector assembly
LAM RESEARCH853-540066-005endpoint detector module
Product description
Lam Research endpoint detector module / assembly, used in 9400 PTX/DFM-related context.
Specifications and identifiers
supported details
FunctionEndpoint detector
Optical/electronic module used to monitor process endpoint signals.
Platform context9400 PTX and 9400DFM/PTX referenced
Potential Lam platform context; verify exact tool compatibility.
Revision evidenceRev F appears in multiple titles
Revision should be checked.
Equipment context
  • Lam Research 9400 PTX / 9400DFM/PTX context
Applications
plasma etch endpoint detectionoptical process monitoringLam process modulesEndpoint detector replacementProcess endpoint signal troubleshooting
How it works

An endpoint detector module used to sense optical or process signals that indicate process completion or transition.

Endpoint detection helps control etch or deposition timing and improves process repeatability.

Technical guide
optical_electronics

May include photodetectors, optics, wiring, and electronic circuits; exact construction is not confirmed.

endpoint_detection

Monitors signals from the process chamber to determine when a target process state has been reached.

Detector
Sensor module that converts a physical signal into an electrical signal.
Endpoint
A process transition or completion point.
What to verify before purchase
  • Confirm optical path, connector, and revision.
  • Confirm exact Lam platform/chamber compatibility.
Confirm with the seller
  • Exact tool serial compatibility is not confirmed.
  • Operating condition and calibration status are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

25695 LAM RESEARCH ENDPOINT DETECTOR 853-540066-005

25695 LAM RESEARCH ENDPOINT DETECTOR 853-540066-005

USD 2210.5200

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: Mar 3, 2023 06:30 UTC
End recorded: Dec 6, 2024 22:47 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 1, 2026 16:16 UTC

Availability has not been rechecked; current availability is unknown.

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