Brand New 853-800749-014 Lam Research 1-Year Warranty Fast Delivery1PCS Lam Research 853-800749-014 Module Brand New US Stock Fast Free ShippingLam research 853-800749-014 Rev A / Free Expedited ShippingRF Module Lam research 853-800749-014 Rev ALam Research 853-800749-014 Revision ALam Research 853-800749-014 Revision ANEW Lam Research RF Module 853-800749-014 Phase MAG Controller 2300 EtcherNEW Lam Research RF Module 853-800749-014 Phase MAG Controller 2300 EtcherAs-Is Lam 853-800749-014 ASSY PHASE MAG TCPLam research 853-800749-014 Rev A / Free Expedited ShippingLam Research Assy Phase Mag TCP 853-800749-01414245 LAM RESEARCH 715-330896-004,SEM-I-53=2M24 853-800749-014Lam Research RF Connector 853-800749-014 / Free Expedited ShippingLam Research RF Connector 853-800749-014 / Free Expedited Shipping1PCS Lam Research 853-800749-014 Module Brand New US Stock Fast Free Shipping
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LAM RESEARCH 853-800749-014

phase magnitude TCP RF module

Market Availability & Pricing

Part number853-800749-014
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales299 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Control Modules
phase magnitude TCP RF module
LAM RESEARCH853-800749-014phase/magnitude RF module
Product description
Lam Research phase/magnitude TCP RF module or controller assembly.
Specifications and identifiers
supported details
FunctionPhase MAG / phase magnitude TCP assembly
RF-related control or sensing module for TCP systems.
Revision evidenceRev A / Rev B referenced
Revision should be confirmed.
Platform context2300 etcher referenced in one title
Potential context; verify with tool documentation.
Equipment context
  • Lam TCP / 2300 etcher RF subsystem
Applications
TCP RF systemsetch RF control modulesphase/magnitude signal conditioningRF phase/magnitude module replacementTCP RF subsystem troubleshooting
How it works

An RF phase/magnitude control module used in RF/plasma power systems.

RF components help deliver stable plasma power, protect generators, and maintain process repeatability.

Technical guide
electrical_assembly

Materials vary by module and may include copper conductors, ceramic/insulating parts, and electronic components.

rf_power

RF power systems generate, route, filter, or match high-frequency energy used for plasma processing.

ESC
Electrostatic chuck.
Match
Impedance-matching network between an RF generator and plasma load.
Phase/magnitude
RF signal properties used for monitoring or control.
RF
Radio frequency.
TCP
Transformer coupled plasma in Lam terminology/context.
What to verify before purchase
  • Confirm revision and exact RF module configuration.
  • Confirm whether this is a standalone module or part of a larger RF assembly.
Confirm with the seller
  • Exact tool serial compatibility is not confirmed.
  • Operating condition and calibration status are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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