Lam research 853-800838-011 Rev C Lam research 853-800838-011 Rev B (Lot of 4)Lam Research Used 853-800838-011 Rev.B SEM-I-96=2M24US Stock 853-800838-011 Lam Research Expedited Shipping UPS DeliveryLam Research Brand New 853-800838-011 RF Vacuum Controller US Stock Fast ShipLam research 853-800838-011 Rev C / Free Expedited ShippingNew Lam Research P/N 853-800838-011 Rev:E #F19LAM RESEARCH RF MODULE 853-800838-011 Rev BNew Lam Research P/N 853-800838-011 Rev:E #D2New Lam Research P/N 853-800838-011 Rev:E #F4New Lam Research P/N 853-800838-011 Rev：ENEW Lam Research RF Module 853-800838-011 with Coax & 9-Pin Serial ConnectionsLam research 853-800838-011 Rev B / Free Expedited ShippingLAM RF MODULE 853-800838-011 Rev ENew Lam Research P/N 853-800838-011 Rev：ELam research 853-800838-011 Rev B / Free Expedited ShippingLam research 853-800838-011 Rev C / Free Expedited ShippingLAM 1015435 RF MODULE 853-800838-011 Rev BLam Research ASSY,VI PROBE,TCCT MTCH,KIYO 4 853-800838-011Lam Research ASSY,VI PROBE,TCCT MTCH,KIYO 4 853-800838-011Lam Research Used 853-800838-011 Rev.B SEM-I-96=2M24Lam research 853-800838-011 Rev B / Free Expedited ShippingLam Research Brand New 853-800838-011 RF Vacuum Controller US Stock Fast Ship
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LAM RESEARCH 853-800838-011

RF Module Assembly

Market Availability & Pricing

Part number853-800838-011
ManufacturerLAM RESEARCH
Current availabilitySee listings below
Latest completed listing with reported sales160 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Modules
RF Module Assembly
LAM RESEARCH853-800838-011RF module assembly
Product description
RF module assembly / VI probe TCCT match Kiyo 4 context for Lam Research RF hardware.
Specifications and identifiers
identified features
Item nounRF module assembly
Electronic/RF assembly used in the RF delivery or matching subsystem.
Specific contextVI probe, TCCT match, Kiyo 4
One source gives a more specific Lam context; should be verified.
Revision examplesRev B, Rev C, Rev E
Multiple revisions appear and must be matched.
Equipment context
  • Lam Research Kiyo 4
Applications
Kiyo etch RF systemsRF match assembliesVI probe or RF monitoring circuitsRF monitoring or match-network interfaceLam Kiyo RF subsystem service replacement
How it works

An RF module assembly can monitor, condition, or interface RF signals in a plasma processing tool.

RF modules are tightly tied to match networks, plasma power delivery, and tool-specific cabling, so revision and connector matching are important.

Technical guide
RF matching

Impedance matching between RF generator and plasma load.

VI probe

Voltage/current probe used to monitor RF power conditions.

What to verify before purchase
  • Verify revision, connector set, cable/coax configuration, and whether the target system is Kiyo 4.
  • Confirm RF ratings and calibration requirements.
Confirm with the seller
  • Exact RF ratings and full tool compatibility are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Lam research 853-800838-011 Rev C

Lam research 853-800838-011 Rev C

USD 199.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Aug 10, 2026 07:03 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 16, 2026 16:27 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

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40244 LAM RESEARCH RF MODULE ASSY 853-800838-011

USD 250.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
SG
Condition: Used
Listed: May 11, 2026 09:56 UTC
Estimated remaining at check: 2
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:22 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

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Lam research 853-800838-011 Rev B (Lot of 4)

Lam research 853-800838-011 Rev B (Lot of 4)

USD 499.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Apr 6, 2026 04:36 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Oct 15, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
Lam Research Used 853-800838-011 Rev.B SEM-I-96=2M24

Lam Research Used 853-800838-011 Rev.B SEM-I-96=2M24

USD 149.9800

Observed public listing price, not an accepted sale amount.

Observed active at check time
KR
Condition: Used
Listed: Jun 21, 2020 10:05 UTC
End recorded: Dec 7, 2024 10:28 UTC
Estimated remaining at check: 3
Estimated sold at check: 0

eBay response captured — Checked Oct 20, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer · Buy It Now

View on eBay

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