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ADVANCED ENERGY APEX 5513

Apex 5513 RF Generator

Market Availability & Pricing

Part numberAPEX 5513
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales8500 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
Apex 5513 RF Generator
ADVANCED ENERGYAPEX 5513RF generator
Product description
Advanced Energy Apex 5513 high-frequency / RF generator, with Advanced Energy part numbers 3156115-704 and 3156115-205 appearing in evidence.
Specifications and identifiers
rf power details
ModelApex 5513
VendorAdvanced Energy
FunctionHigh-frequency / RF generator
Part Numbers Seen3156115-704; 3156115-205
Input Voltage208 V appears in one provided record
Applications
Plasma etchPVD/CVD plasma generationRF power subsystemsPlasma RF power generationReplacement RF generator for semiconductor process equipment
How it works

An RF generator supplies radio-frequency power to a plasma process through a matching network.

Frequency, power rating, input voltage, connector style, and communication interface must match the tool and RF match.

Technical guide
RF_power

Radio-frequency energy used to sustain plasma in semiconductor process tools.

AE
Advanced Energy.
Apex
Advanced Energy RF generator family.
What to verify before purchase
  • Confirm exact power rating, frequency, input voltage, and communication interface from the nameplate.
  • Verify matching network and tool compatibility.
Confirm with the seller
  • Specific tool compatibility beyond the provided part evidence is not independently confirmed.
  • Calibration or functional status is not confirmed from the part identity alone.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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