| Model | Apex 5513 |
|---|---|
| Vendor | Advanced Energy |
| Function | High-frequency / RF generator |
| Part Numbers Seen | 3156115-704; 3156115-205 |
| Input Voltage | 208 V appears in one provided record |
An RF generator supplies radio-frequency power to a plasma process through a matching network.
Frequency, power rating, input voltage, connector style, and communication interface must match the tool and RF match.
Radio-frequency energy used to sustain plasma in semiconductor process tools.
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| Time recorded | Listing | Observation | Public price | Recorded acceptance |
|---|---|---|---|---|
| Dec 27, 2025 02:22 UTC | AE APEX-5513 PN 3156115-705 Novellus Power Supply 208V 5.5kW 13.56MHz | Completed listing price | 3199.99 (currency not captured) | Not established |
| Oct 19, 2025 20:08 UTC | AE APEX-5513 P/N 3156115-007 C, Novellus P/N 27-284656-00 | Completed listing price | 3750 (currency not captured) | Not established |
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