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ADVANCED ENERGY FCPI980CBAXDIDJAA

Aera PI-98 Mass Flow Controller

Market Availability & Pricing

Part numberFCPI980CBAXDIDJAA
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas › Flow Control › Mass Flow Controllers
Aera PI-98 Mass Flow Controller
ADVANCED ENERGYFCPI980CBAXDIDJAAMass Flow Controller
Product description
AERA PI-98 Pressure Insensitive MGMR FCPI980CBAXDIDJAA; AMAT 0190-34212/0190-34213/0190-34214/0190-34218 variants; H2/N2 1000 SCCM appears for 0190-34214 listings
Specifications and identifiers
flow control
Model/familyAERA PI-98
Aera PI-98 model/family from source titles
Model codeFCPI980CBAXDIDJAA
Full model/configuration code from source titles
Technology cluePressure Insensitive MGMR
Source title wording; exact manufacturer meaning should be verified
Flow variants seen/100, /300, /1000, /51000
Different source titles show different suffix/range variants
AMAT part numbers seen0190-34212, 0190-34213, 0190-34214, 0190-34218
Multiple AMAT cross-references appear for the same base model code
Gas/range clueH2 N2 1000 SCCM
Only appears in listings tied to AMAT 0190-34214
Applications
Process gas deliveryGas boxesMFC gas sticksPurge gas regulationGas flow controlProcess gas deliveryHydrogen or nitrogen flow control when calibrated accordingly
How it works

A mass flow controller measures and controls gas flow to a commanded setpoint.

Semiconductor process tools rely on calibrated MFCs for repeatable gas delivery, purge flows, and process stability.

Technical guide
Pressure-insensitive mass flow control

Pressure-insensitive MFC designs are intended to reduce flow variation caused by upstream or downstream pressure changes within their operating limits.

Stable flow despite pressure variation can improve process repeatability.

Verify: Exact gas calibration; Flow range suffix; Fitting type; Control signal; Calibration date
H2
Hydrogen
MFC
Mass flow controller
MGMR
Source-provided abbreviation; exact expansion not confirmed
N2
Nitrogen
SCCM
Standard cubic centimeters per minute
What to verify before purchase
  • Exact AMAT cross-reference
  • Flow range suffix
  • Calibration gas
  • Fitting type
  • Electrical/control interface
  • Calibration condition
Confirm with the seller
  • Whether all suffix variants are interchangeable
  • Exact gas calibration for each AMAT part
  • Specific AMAT tool compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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