Aera FCPI981CBAXDIDJAA Mass Flow Controller MFC PI-98 AMAT 0190-34217 New SpareAERA MFC PI-98, FCPI981CBAXDIDJAA AMAT 0190-34216, 10000 SCCM, N2 Lot of 2 #yrAERA MFC PI-98, FCPI981CBAXDIDJAA AMAT 0190-34216, 10000 SCCM, N2 *lhAERA MFC PI-98, FCPI981CBAXDIDJAA AMAT 0190-34216, 10000 SCCM, N2 Lot of 2 *mp✅ AERA PI-98 Pressure Insensitive MGMR FCPI981CBAXDIDJAA /51000 AMAT 0190-34221✅ AERA PI-98 Pressure Insensitive MGMR FCPI981CBAXDIDJAA 3000 AMAT 0190-34215✅ AERA PI-98 Pressure Insensitive MGMR FCPI981CBAXDIDJAA 10000 AMAT 0190-34216✅ AERA PI-98 MGMR FCPI981CBAXDIDJAA 30000 AMAT 0190-34217 PRESSURE INSENSITIVE
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APPLIED MATERIALS FCPI981CBAXDIDJAA

Aera PI-98 Pressure-Insensitive Mass Flow Controller

Market Availability & Pricing

Part numberFCPI981CBAXDIDJAA
ManufacturerAPPLIED MATERIALS
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas › Flow Control › Mass Flow Controllers
Aera PI-98 Pressure-Insensitive Mass Flow Controller
APPLIED MATERIALSFCPI981CBAXDIDJAAMass Flow Controller
Product description
AERA PI-98 Pressure Insensitive MGMR FCPI981CBAXDIDJAA; variants 3000, 10000, and /51000 appear with AMAT 0190-34215, 0190-34216, and 0190-34221
Specifications and identifiers
flow control
Model/familyAERA PI-98
Aera PI-98 model/family from source titles
Model codeFCPI981CBAXDIDJAA
Full model/configuration code from source titles
Technology cluePressure Insensitive MGMR
Source title wording; exact manufacturer meaning should be verified
Flow/range variants seen3000, 10000, /51000
Different source titles show different range/suffix variants
AMAT part numbers seen0190-34215, 0190-34216, 0190-34221
Different AMAT cross-references appear for different variants
Applications
Process gas deliveryGas boxesMFC gas sticksPurge gas regulationGas flow controlProcess gas deliveryHigh-purity flow regulation
How it works

A mass flow controller measures and controls gas flow to a commanded setpoint.

Semiconductor process tools rely on calibrated MFCs for repeatable gas delivery, purge flows, and process stability.

Technical guide
Pressure-insensitive mass flow control

Pressure-insensitive MFC designs are intended to reduce flow variation caused by pressure changes within their operating limits.

Stable flow despite pressure variation can improve process repeatability.

Verify: Exact gas calibration; Flow range suffix; Fitting type; Control signal; Calibration date
MFC
Mass flow controller
MGMR
Source-provided abbreviation; exact expansion not confirmed
What to verify before purchase
  • Exact AMAT cross-reference
  • Flow range/suffix
  • Calibration gas
  • Fitting type
  • Electrical/control interface
  • Calibration condition
Confirm with the seller
  • Whether listed variants are interchangeable
  • Exact gas calibration
  • Specific AMAT tool compatibility

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

Aera FCPI981CBAXDIDJAA Mass Flow Controller MFC PI-98 AMAT 0190-34217 New Spare

Aera FCPI981CBAXDIDJAA Mass Flow Controller MFC PI-98 AMAT 0190-34217 New Spare

USD 1005.2500

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: May 22, 2025 17:09 UTC
Estimated remaining at check: 7
Estimated sold at check: 0

eBay response captured — Checked Oct 12, 2026 16:10 UTC

Availability has not been rechecked; current availability is unknown.

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