Product description
Brooks GF120C-104837 mass flow controller (MFC), associated with Applied Materials 0190-48218 in source descriptions.
Specifications and identifiers
supported details
| Vendor/model | Brooks GF120C-104837 Model repeatedly appears in the descriptions. |
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| Function | Mass flow controller Controls process gas flow rate. |
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| Associated AMAT number | 0190-48218 Appears as an Applied Materials association in the descriptions. |
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Applications
gas panel MFC replacementprocess gas deliverytool calibration and maintenanceGas-panel MFC replacement.Process gas flow control where GF120C-104837 and AMAT 0190-48218 match.
How it works
A mass flow controller meters and regulates process gas flow in a semiconductor tool.
Gas type, full-scale range, calibration, fittings, and communication interface must match the process recipe and hardware.
Technical guide
MFC
Closed-loop flow-control device using a flow sensor and valve.
- GF120C
- Brooks mass-flow-controller model family
- MFC
- mass flow controller
What to verify before purchase
- Confirm gas, full-scale flow range, fitting type, and calibration label.
- Verify whether the buyer needs the Brooks model number or the associated Applied Materials part number.
Confirm with the seller
- Exact tool compatibility beyond the supported platform or description is not confirmed.
- Condition, calibration state, and service history are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.