AE ADVANCED ENERGY MDX 1.5K RF power supply MDX 1.5KAdvanced Energy 3152164-015 MDX 1.5K DC Magnetron Sputtering Power SupplyAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152164-016 DC Magnetron Power Supply *used workingAE Advanced Energy MDX 1.5K 3152240-007 DC Magnetron Power Supply Untested Used
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ADVANCED ENERGY MDX 1.5K

MDX 1.5 kW DC Magnetron Power Supply

Market Availability & Pricing

Part numberMDX 1.5K
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales640 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › Power Supplies › Magnetron Power Supplies
MDX 1.5 kW DC Magnetron Power Supply
ADVANCED ENERGYMDX 1.5KDC magnetron power supply
Product description
Advanced Energy MDX 1.5K DC magnetron / sputtering power supply, 1.5 kW class.
Specifications and identifiers
electrical
Power class1.5 kW
Output/application typeDC magnetron / sputtering power supply
model cross refs
ModelMDX 1.5K / MDX-1.5K
Referenced part numbers3152164-015, 3152164-016, 3152240-007, 3152164-005
Multiple Advanced Energy configuration or part numbers are referenced; verify exact nameplate.
Applications
Semiconductor equipment power cabinetsPlasma and sputtering systemsHeater or subsystem power distributionDC magnetron sputtering source powerPlasma process power supply replacement
How it works

A power conversion module or supply used to deliver controlled electrical power to a subsystem or process source.

Power supplies must match voltage, current/power rating, control interface, cooling, and tool-specific interlocks.

Technical guide
DC power

Direct-current output used for process sources or control subsystems.

soft start

Controlled startup behavior to limit inrush or ramp output gradually when supported by the unit.

DAQ
Data acquisition, when used in control-system context.
kW
Kilowatt power rating.
What to verify before purchase
  • Verify exact Advanced Energy model and nameplate part number.
  • Confirm input voltage, cooling, interlock, remote-control interface, and output rating.
Confirm with the seller
  • The evidence does not confirm a single exact configuration suffix for all units.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

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