Product description
Advanced Energy MDX-5K magnetron drive / DC sputter power supply, 5 kW class.
Specifications and identifiers
identification
| Product family | MDX-5K Advanced Energy MDX 5 kW power supply family. |
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| Power class | 5 kW Nominal output power class stated with the model. |
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| Application description | Magnetron drive / sputter power supply Used to drive sputtering sources in PVD systems. |
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| Variant references | 2011-000, 2011-000-E, 2011-000-M, 2011-014-V, 3152011-054, 3152226-004Q Multiple ordering/configuration numbers appear; exact variant must be matched. |
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Applications
tool power cabinetsRF/DC process powerelectronics towersPVD sputter source powermagnetron cathode drivesemiconductor thin-film deposition equipment
How it works
A DC magnetron sputter power supply that supplies controlled electrical power to a semiconductor tool subsystem.
Power units must match output ratings, control interface, cooling, connector style, mounting, and safety approvals.
Technical guide
magnetron_drive
A DC power supply style commonly associated with sputtering power delivery when supported by the specific model.
What to verify before purchase
- Exact output voltage/current ratings and input voltage
- Cooling requirements
- Interface/remote control option
- Arc handling and process configuration
- Variant/order number
Confirm with the seller
- Specific tool compatibility is not confirmed.
- Exact revision/configuration is not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.