Product description
Advanced Energy RFPP RF-30S RF generator; 13.56 MHz, 3 kW reported in provided evidence.
Specifications and identifiers
Identifying details
| Model/family | RFPP RF-30S / RF30S Model phrase appears in all provided evidence. |
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| Reported frequency | 13.56 MHz Reported in one detailed description; verify on nameplate. |
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| Reported output | 3 kW Reported in one detailed description; verify on nameplate. |
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| Reported part numbers | 3150017-012 / 3150017-013 Variants appear in provided evidence. |
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Applications
plasma etch systemsPECVD or PVD plasma sourcesRF power subsystem repairRF plasma power generationReplacement RF generator for semiconductor process tools
How it works
An RF generator supplies radio-frequency power to plasma process equipment.
RF generators are central to plasma stability and must match frequency, power level, control interface, and matching network.
Technical guide
rf_power
13.56 MHz is a common industrial RF plasma frequency; exact unit rating should be verified.
- RFPP
- Advanced Energy RF power product/family designation as shown in evidence
What to verify before purchase
- Verify nameplate frequency, output power, input voltage, cooling, interface, and revision.
- Confirm matching network compatibility and tested condition.
Confirm with the seller
- Exact configuration suffix and compatibility with a specific tool are not confirmed.
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.