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ADVANCED ENERGY RF30S

RFPP RF-30S RF Generator

Market Availability & Pricing

Part numberRF30S
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales499.99 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
RFPP RF-30S RF Generator
ADVANCED ENERGYRF30SRF generator
Product description
Advanced Energy RFPP RF-30S RF generator; 13.56 MHz, 3 kW reported in provided evidence.
Specifications and identifiers
Identifying details
Model/familyRFPP RF-30S / RF30S
Model phrase appears in all provided evidence.
Reported frequency13.56 MHz
Reported in one detailed description; verify on nameplate.
Reported output3 kW
Reported in one detailed description; verify on nameplate.
Reported part numbers3150017-012 / 3150017-013
Variants appear in provided evidence.
Applications
plasma etch systemsPECVD or PVD plasma sourcesRF power subsystem repairRF plasma power generationReplacement RF generator for semiconductor process tools
How it works

An RF generator supplies radio-frequency power to plasma process equipment.

RF generators are central to plasma stability and must match frequency, power level, control interface, and matching network.

Technical guide
rf_power

13.56 MHz is a common industrial RF plasma frequency; exact unit rating should be verified.

RFPP
Advanced Energy RF power product/family designation as shown in evidence
What to verify before purchase
  • Verify nameplate frequency, output power, input voltage, cooling, interface, and revision.
  • Confirm matching network compatibility and tested condition.
Confirm with the seller
  • Exact configuration suffix and compatibility with a specific tool are not confirmed.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

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