Product description
Advanced Energy RFG2000-2V RF generator / RF power source, associated with 3155053-series and AMAT 0920-00102W in some descriptions.
Specifications and identifiers
power details
| Model | RFG2000-2V Advanced Energy RF generator model. |
|---|
| Associated part numbers | 3155053-003 / 3155053-007 / 0920-00102W references Verify suffix and AMAT cross-reference on the nameplate. |
|---|
Applications
plasma processingetch chambersCVD chambersPVD chambersRF plasma power generationEtch/CVD/PVD RF power subsystem
How it works
An RF or plasma power source that supplies energy used to create or sustain plasma.
Generator model, frequency, power rating, input voltage, and interface compatibility determine whether it can be used on a specific tool.
What to verify before purchase
- Output frequency and power rating
- Input voltage and cooling
- Exact Advanced Energy part suffix
Confirm with the seller
- Exact tool compatibility beyond the named platform/context
- Calibration or working condition
- Revision interchangeability
Product reference only. Confirm fitment, revision, included components, and specifications before purchase.