AE Advanced Energy ATX-600, RFX 600 RF Power SupplyAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-005EAdvanced Energy ATX 600 RF Generator + RFX-600 & Impedance Matching NetworkAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-021CAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-021CAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-005E Advanced Energy AE RFX 600 RF Power Supply , Generator 3155002-000 M (AS IS)Advanced Energy AE RFX 600 RF Power Supply , Generator 3155002-000 MAdvanced Energy AE RFX 600 RF Power Supply Generator 3155002-007CAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002 Advanced Energy AE RFX 600 RF Power Supply , Generator 3155002 (AS IS)Advanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-005EAdvanced Energy AE RFX 600 RF Reflected Power Supply Generator PN 3155002-021CAdvanced Energy RFX 600 Plasma 13.56Mhz 600W RF Generator Tag #49
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ADVANCED ENERGY RFX 600

RF Generator

Market Availability & Pricing

Part numberRFX 600
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported sales2015.29 (currency not captured) — public listing price; reported sold quantity is not a verified transaction
Electrical › RF Power › RF Generators
RF Generator
ADVANCED ENERGYRFX 600RF generator
Product description
RF Generator (Advanced Energy context noted); 13.56MHz noted; 600 W noted
Specifications and identifiers
evidence extracted details
Electrical rating13.56MHZ
13.56 MHz RF frequency appears in listing evidence.
Electrical rating600 W
600 W power appears in listing evidence.
source title examples
Example listing titleAdvanced Energy RFX-600, 13.56MHz, 600 Watt, Plasma RF Generator, parts only B
Provided source title used as evidence.
Example listing titleAdvanced Energy RFX-600, 13.56MHz, 600 Watt, Plasma RF Generator, parts only A
Provided source title used as evidence.
Example listing titleAE Advanced Energy RFX-600 RF Generator / ATN 500 RF MATCHING UNIT/ 13.56 MHZ
Provided source title used as evidence.
Applications
RF plasma powerprocess powertool power systemsReplacement or spare part for semiconductor process/support equipment.Verify revision, configuration, condition, and tool compatibility before installation.
How it works

A power-generation or conversion unit used to supply controlled electrical/RF energy.

Output rating, frequency, phase/input voltage, cooling, and match/controller compatibility must be verified.

Technical guide
ASSY
Assembly.
P/N
Part number.
PCB
Printed circuit board.
TC
Often thermocouple in tool hardware context; verify from documentation.
VCR
Vacuum Coupling Radiation or VCR-style metal gasket face-seal fitting, depending on context; verify exact fitting standard.
What to verify before purchase
  • Exact manufacturer part number and revision on the item label.
  • Tool/platform compatibility and whether the listing includes all subcomponents shown in the title.
  • Condition, contamination/cleanliness status, and whether refurbishment or calibration is required.
Confirm with the seller
  • Exact OEM datasheet specifications unless explicitly present in the provided titles.
  • Guaranteed compatibility with a specific chamber or tool configuration beyond the listing-title evidence.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

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Direct marketplace listings

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