ADVANCED ENERGY RFX-600
RF Generator
Market Availability & Pricing
wSemi tracks marketplace activity for ADVANCED ENERGY RFX-600. Current records show 28 active listings and 79 historical observations.
Current availability
28 active
Listings tracked
107 tracked
First seen
Jun 25, 2021
Most recent
Jun 17, 2026
Average observed price
$1,848.05
RF Generator
ADVANCED ENERGY RFX-600 RF generator
Reviewed & confirmed
↓ Listings
Reference Description
RF Generator (Advanced Energy context noted); 13.56MHz noted; 600 W noted
Key Details
Evidence Extracted Details
| Electrical rating | 13.56MHZ 13.56 MHz RF frequency appears in listing evidence. |
| Electrical rating | 600 W 600 W power appears in listing evidence. |
Source Title Examples
| Example listing title | Advanced Energy RFX-600, 13.56MHz, 600 Watt, Plasma RF Generator, parts only B Provided source title used as evidence. |
| Example listing title | Advanced Energy RFX-600, 13.56MHz, 600 Watt, Plasma RF Generator, parts only A Provided source title used as evidence. |
| Example listing title | AE Advanced Energy RFX-600 RF Generator / ATN 500 RF MATCHING UNIT/ 13.56 MHZ Provided source title used as evidence. |
Common Uses & Applications
RF plasma powerprocess powertool power systemsReplacement or spare part for semiconductor process/support equipment.Verify revision, configuration, condition, and tool compatibility before installation.
How It Works
A power-generation or conversion unit used to supply controlled electrical/RF energy.
Output rating, frequency, phase/input voltage, cooling, and match/controller compatibility must be verified.
Technical Glossary
- ASSY
- Assembly.
- PCB
- Printed circuit board.
- P/N
- Part number.
- VCR
- Vacuum Coupling Radiation or VCR-style metal gasket face-seal fitting, depending on context; verify exact fitting standard.
- TC
- Often thermocouple in tool hardware context; verify from documentation.
Verify Before Purchase
- Exact manufacturer part number and revision on the item label.
- Tool/platform compatibility and whether the listing includes all subcomponents shown in the title.
- Condition, contamination/cleanliness status, and whether refurbishment or calibration is required.
Not Confirmed From Available Evidence
- Exact OEM datasheet specifications unless explicitly present in the provided titles.
- Guaranteed compatibility with a specific chamber or tool configuration beyond the listing-title evidence.
Reference information is compiled from observed listings and technical enrichment.
Verify fitment, revision, and specifications before purchase.
107 listings tracked
28 active
45 sold
78 completed
Jun 25, 2021
First Seen
Jun 17, 2026
Most Recent
$1,848.05
Average Price
$1,800.00
Last Sold Price
Feb 27, 2026
Price History (Last 50 Items)
Related Part Numbers
💡 Market Summary
Our comprehensive database contains 107 total listings for part number RFX-600 from ADVANCED ENERGY. Currently, there are 28 active listings available for purchase. Historical data for this part extends back to June 2021, with the most recent activity on June 17, 2026.
Price analysis reveals an average selling price of $1,848.05, with observed prices ranging from $1.00 to $8,400.00. Market activity shows 78 completed transactions, representing 45 units sold. Whether you're looking to buy or sell, this historical data can help you understand current market conditions and pricing trends for this part.
Available Listings
Current and Historical Listings (107 Total)
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Advanced Energy RFX-600 Power Supply & ATX-600 Control 315 5002-k ,315 5021-b
Listed: Jun 17, 2026
● Active
View Listing →
$2,800.00
ADVANCED ENERGY 3155002-005E RFX-600 RF GENERATOR
Listed: May 12, 2026
● Active
View Listing →
$1,250.00
Advanced Energy RFX600 RF Generator 3155002-005E AE 600W 230VAC RFX-600 Tested
Listed: May 2, 2026
● Active
View Listing →
$2,150.00
ADVANCED ENERGY AE RFX-600 3155002-005 RF GENERATOR *POWERS UP*
Listed: Feb 9, 2026
● Active
View Listing →
$2,299.00
C201591 Advanced Energy 5017-003-B RF Match RFX-600 Generator AFX-600 Controller
Listed: Feb 2, 2026
● Active
View Listing →
$1,000.00
Advanced Energy 5002 005-E RFX-600 Reflected Power Industrial RF Generator 230v
Listed: Jan 27, 2026
● Active
View Listing →
$1,050.00
Advanced Energy 3155002-000M RFX-600 RF Power Supply Generator 600W
Listed: Jan 7, 2026
● Active
View Listing →
$1,125.00
AE Advanced Energy RFX-600 RF Generator Unit Part 5002-000-M
Listed: Jan 5, 2026
● Active
View Listing →
$499.99
Advanced Energy PN 2305061-D Core Control PCB Assembly RFX-600 RF Match Network
Listed: Dec 10, 2025
● Active
View Listing →
$449.99
Advanced Energy RFX600 RFX-600 RF Generator 600W 13.56MHz Factory Refurb
Listed: Oct 23, 2025
● Active
View Listing →
$1,999.00
Advanced Energy RFX600 RF Generator 3155002-025C AE 600W RFX-600 13.56MHz Tested
Listed: Oct 6, 2025
● Active
View Listing →
$2,950.00
RF-20MWC, Advanced Energy, RFX-600 ATX-600 RF Power Supply
Listed: Jun 23, 2025
● Active
View Listing →
$8,400.00
AE Advanced Energy RFX-600 3155002-032B RF Generator
Listed: Apr 20, 2025
● Active
View Listing →
$1,849.00
^^ ADVANCED ENERGY RFX-600 & US GUN II ATN RF GENERATOR (SMJ111)
Listed: Apr 17, 2025
● Active
View Listing →
$1,250.00
AE Advanced Energy RFX-600 3155002-032 RF Generator
Listed: Mar 14, 2025
● Active
View Listing →
$1,118.00
RFX-600 RF Power Supply Advanced Energy 3155002-000M
Listed: Mar 11, 2025
● Active
View Listing →
$1,840.00
RFX-600 RF Power Supply Advanced Energy 3155002-000M
Listed: Feb 20, 2025
● Active
View Listing →
$1,840.00
Advanced Energy RFX-600 RFX600 RF Power Supply Generator 30 Days Warranty
Listed: Jan 16, 2025
● Active
View Listing →
$1,999.00
Advanced Energy RFX-600 RFX600 3155002-005F RF Power Supply Generator Fast Ship
Listed: Jan 7, 2025
● Active
View Listing →
$2,500.00
Advanced Energy RFX-600 RFX600 3155002-005E RF Generator 30 Days Warranty
Listed: Jan 7, 2025
● Active
View Listing →
$2,500.00
Advanced Energy RFX600 RF Generator 3155002-000 AE 600W 120VAC RFX-600 13.56MHz
Listed: Nov 17, 2024
● Active
View Listing →
$3,950.00
Advanced Energy RFX600 RF Generator 3155002-005 AE 600W 230VAC RFX-600 13.56MHz
Listed: Nov 13, 2024
● Active
View Listing →
$3,950.00
AE ADVANCED ENERGY 3155002-022 RFX-600 REFLECTED POWER RF GENERATOR, 171727
Listed: Sep 27, 2024
● Active
View Listing →
$4,500.00
Advanced Energy RFX-600 RF Generator - MN: 3155002-022
Listed: Jun 13, 2023
● Active
View Listing →
$3,000.00