ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, SiH4, 102993ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, N2, 102937ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, CI2, 102936ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 100 SCCM, HBr,102854ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, O2, 102853
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ADVANCED ENERGY TC FC-D980C

Aera FC-D980C Mass Flow Controller

Market Availability & Pricing

Part numberTC FC-D980C
ManufacturerADVANCED ENERGY
Current availabilitySee listings below
Latest completed listing with reported salesNo qualifying listing found
Gas Delivery › Flow Control › Mass Flow Controllers
Aera FC-D980C Mass Flow Controller
ADVANCED ENERGYTC FC-D980CMass flow controller
Product description
Advanced Energy / Aera TC FC-D980C mass flow controller; gas/range configuration varies by unit
Specifications and identifiers
identification
Normalized item typeMass flow controller
Aera FC-D980C MFC family identified.
process attributes
Reported flow ranges50 sccm, 100 sccm, and 1 slm variants
Different units may be configured for different gas/range combinations.
Reported gasesHBr, SiH4, N2, Cl2, and O2 variants
Gas calibration varies and must be verified from label or calibration record.
Applications
process gas deliveryCVD gas panelsetch gas panelsProcess gas flow controlGas panel MFC replacement
How it works

A precision device that meters and controls process gas flow to a specified range and gas calibration.

MFCs are gas- and range-specific; using the wrong calibration can produce incorrect process gas delivery.

Technical guide
stainless steel

Corrosion-resistant metal commonly used in vacuum and gas-delivery hardware.

Aera MFC

Aera-branded mass-flow-control hardware associated with process gas delivery.

sccm/slm
Standard cubic centimeters per minute / standard liters per minute flow units.
What to verify before purchase
  • Exact gas calibration
  • Full-scale flow range
  • Fitting style and communication interface
  • Calibration date/status
Confirm with the seller
  • A single fixed gas/range configuration is not confirmed for every TC-FC-D980C unit.

Product reference only. Confirm fitment, revision, included components, and specifications before purchase.

Documentation

No public documents were listed for this part when captured.

Available Listings

Prices and availability may change. Confirm details with the seller.

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, SiH4, 102993

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, SiH4, 102993

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 31, 2021 20:00 UTC
End recorded: Dec 6, 2024 17:54 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:20 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, N2, 102937

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, N2, 102937

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 28, 2021 02:31 UTC
End recorded: Dec 7, 2024 00:47 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, CI2, 102936

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 50 SCCM, CI2, 102936

USD 1100.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 28, 2021 02:00 UTC
End recorded: Dec 6, 2024 21:52 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 100 SCCM, HBr,102854

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 100 SCCM, HBr,102854

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 21, 2021 19:31 UTC
End recorded: Dec 7, 2024 02:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay
ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, O2, 102853

ADVANCED ENERGY Mass Flow Controller Aera TC FC-D980C, MFC, 1 SLM, O2, 102853

USD 950.0000

Observed public listing price, not an accepted sale amount.

Observed active at check time
US
Condition: Used
Listed: Dec 21, 2021 19:30 UTC
End recorded: Dec 7, 2024 02:27 UTC
Estimated remaining at check: 1
Estimated sold at check: 0

eBay response captured — Checked Sep 29, 2026 16:19 UTC

Availability has not been rechecked; current availability is unknown.

Buy It Now

View on eBay

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