Results for 'APEX+5513'

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Search by exact part number, the start of a part number, or words from its description. All description words must match. Catalog-description search does not support quoted phrases or exclusions; marketplace search does. Results are reference records, not verified available listings.

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Advanced Energy AE APEX 5513 0190-16198W 3156115-002 RF Generator F/R E + hoses

2274.35 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Jun 25, 2021 19:31 UTC
End recorded: Jan 4, 2022 05:42 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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AE Advanced Energy RF Generator Apex 5513 3156115-651, P/N 27-365881-00

AE Advanced Energy RF Generator Apex 5513 3156115-651, P/N 27-365881-00

4599 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
IL
Condition: Used
Listed: Nov 16, 2021 13:31 UTC
End recorded: Nov 17, 2021 07:09 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

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AE Advanced Energy RF Generator Apex 5513 3156115-251 A, P/N 27-373073-00

AE Advanced Energy RF Generator Apex 5513 3156115-251 A, P/N 27-373073-00

4499 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
IL
Condition: Used
Listed: Nov 16, 2021 12:00 UTC
End recorded: Nov 17, 2021 07:08 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

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27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGY

27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGY

4500.03 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Nov 2, 2021 19:01 UTC
End recorded: Nov 7, 2021 01:18 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGY

27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGY

4500.03 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Oct 21, 2021 19:36 UTC
End recorded: Nov 2, 2021 18:31 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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Advanced Energy AE Apex 5513 5.5kW 13.56MHz RF Plasma Power Generator 3156116

Advanced Energy AE Apex 5513 5.5kW 13.56MHz RF Plasma Power Generator 3156116

2749.99 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Aug 11, 2021 19:01 UTC
End recorded: Sep 2, 2021 18:07 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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Advanced Energy Apex 5513 RF Generator 3156115-743 AMAT 0190-53909

Advanced Energy Apex 5513 RF Generator 3156115-743 AMAT 0190-53909

1099 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
SG
Condition: Scrap, for parts
Listed: May 31, 2019 07:53 UTC
End recorded: Dec 31, 2019 07:53 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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LAM RESEARCH 27-346753-00 ADVANCED ENERGY APEX 5513 3156115-207 A , USED

LAM RESEARCH 27-346753-00 ADVANCED ENERGY APEX 5513 3156115-207 A , USED

5500 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
KR
Condition: Used
Listed: Jan 13, 2016 02:25 UTC
End recorded: Jul 30, 2019 02:44 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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AE Apex 5513 Advanced Energy RF Generator AMAT Applied Material 0190-11209 -002

AE Apex 5513 Advanced Energy RF Generator AMAT Applied Material 0190-11209 -002

USD 2000.0000Accepted Best OfferAccepted price not disclosed

Original public listing price is shown separately from recorded accepted amounts.

Recorded Completed
SG
Condition: Used
Listed: Aug 15, 2018 09:05 UTC
End recorded: Nov 13, 2018 06:58 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Oct 20, 2026 18:07 UTC.

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LAM RESEARCH 27-373073-00 ADVANCED ENERGY APEX 5513 3156115-251 A , USED

LAM RESEARCH 27-373073-00 ADVANCED ENERGY APEX 5513 3156115-251 A , USED

USD 3200.0000Accepted Best OfferAccepted price not disclosed

Original public listing price is shown separately from recorded accepted amounts.

Recorded Completed
KR
Condition: Used
Listed: Apr 14, 2016 23:54 UTC
End recorded: Oct 31, 2018 10:38 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Oct 20, 2026 18:08 UTC.

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Novellus, AE, APEX 5513, p/n 3156115-053, 27-365881-00

Novellus, AE, APEX 5513, p/n 3156115-053, 27-365881-00

11500 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Apr 11, 2016 17:22 UTC
End recorded: Feb 28, 2018 17:43 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

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NOVELLUS 27-368622-00 AE APEX 5513 13.56 mHz RF Gen

NOVELLUS 27-368622-00 AE APEX 5513 13.56 mHz RF Gen

3800 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Refurbished
Listed: Jul 10, 2016 01:33 UTC
End recorded: Jul 15, 2016 13:41 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
NOVELLUS 27-368622-00 AE APEX 5513 13.56 mHz RF Gen

NOVELLUS 27-368622-00 AE APEX 5513 13.56 mHz RF Gen

3800 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Refurbished
Listed: Feb 29, 2016 21:00 UTC
End recorded: Jun 28, 2016 21:00 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
LAM RESEARCH 27-373073-00 ADVANCED ENERGY APEX 5513 3156115-251 A , USED

LAM RESEARCH 27-373073-00 ADVANCED ENERGY APEX 5513 3156115-251 A , USED

5500 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
KR
Condition: Used
Listed: Jan 13, 2016 01:41 UTC
End recorded: Mar 23, 2016 19:44 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

View on eBay
NOVELLUS 27-344537-00 Advanced Energy 3156115-203 Apex 5513 RF Generator, 13.5

NOVELLUS 27-344537-00 Advanced Energy 3156115-203 Apex 5513 RF Generator, 13.5

4500 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: NEW
Listed: Jan 24, 2016 03:14 UTC
End recorded: Feb 24, 2016 22:49 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
NOVELLUS 27-368622-00 ADVANCED ENERGY (AE) 3156115-253 AE APEX 5513 13.56 mHz R

NOVELLUS 27-368622-00 ADVANCED ENERGY (AE) 3156115-253 AE APEX 5513 13.56 mHz R

3800 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Refurbished
Listed: Jan 24, 2016 05:08 UTC
End recorded: Feb 24, 2016 22:44 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
NOVELLUS 27-344537-00 Advanced Energy 3156115-203 Apex 5513 RF Generator, 13.5

NOVELLUS 27-344537-00 Advanced Energy 3156115-203 Apex 5513 RF Generator, 13.5

4500 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: NEW
Listed: Dec 27, 2014 15:42 UTC
End recorded: Nov 22, 2015 15:42 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
Apex 5513 AE Advanced Energy 3156115-002 RF Generator AMAT 0190-16198 As-Is

Apex 5513 AE Advanced Energy 3156115-002 RF Generator AMAT 0190-16198 As-Is

USD 1507.1400Accepted Best OfferAccepted price not disclosed

Original public listing price is shown separately from recorded accepted amounts.

Recorded Completed
US
Condition: Scrap, for parts
Listed: Jul 23, 2014 18:54 UTC
End recorded: Jan 16, 2015 15:32 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Acceptance recorded by the source; fulfillment is not verified. Availability has not been rechecked; current availability is unknown. Checked Aug 31, 2026 18:26 UTC.

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AE APEX 5513 27-368622-00 RF Generator 3156115-253 Novellus C3 Vector 300mm

AE APEX 5513 27-368622-00 RF Generator 3156115-253 Novellus C3 Vector 300mm

4005.14 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: NEW
Listed: May 9, 2014 21:04 UTC
End recorded: Nov 25, 2014 20:47 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
NOVELLUS 27-368622-00 3156115-253 APEX 5513 RF Generator

NOVELLUS 27-368622-00 3156115-253 APEX 5513 RF Generator

1150 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Refurbished
Listed: Jul 22, 2014 18:47 UTC
End recorded: Sep 20, 2014 18:47 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay
Apex 5513 AE Advanced Energy 3156115-002 RF Generator AMAT 0190-16198 Used As-Is

Apex 5513 AE Advanced Energy 3156115-002 RF Generator AMAT 0190-16198 Used As-Is

1057.09 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Scrap, for parts
Listed: Oct 9, 2013 19:39 UTC
End recorded: Nov 7, 2013 16:32 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

View on eBay
Apex 5513 AE Advanced Energy A3F5L000BA120R131A RF Generator AMAT 0190-11209

Apex 5513 AE Advanced Energy A3F5L000BA120R131A RF Generator AMAT 0190-11209

2107.09 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Oct 14, 2013 15:13 UTC
End recorded: Oct 28, 2013 21:42 UTC

Legacy record; no enhanced status check captured

Check time or freshness is unknown; current availability is unknown.

View on eBay
Apex 5513 AE Advanced Energy A3F5K000BA120A131A RF Generator

Apex 5513 AE Advanced Energy A3F5K000BA120A131A RF Generator

5499.99 (currency not captured)

Legacy public listing price; currency may not have been captured.

Recorded Completed
US
Condition: Used
Listed: Nov 12, 2025 19:15 UTC

Verification lookup unavailable; legacy status shown — Last attempted Aug 26, 2026 16:11 UTC

Availability has not been rechecked; current availability is unknown.

Best Offer lookup was not verified; no accepted-price claim is made.

View on eBay

Market statistics & price history

Auction listing history. Direct marketplace listings are shown separately.

Auction listing records323
Legacy active status15
Legacy completed status308
Source-reported sold quantity (not verified sales)61
First listedOct 9, 2013 19:39 UTC
Most recently listedOct 11, 2026 07:52 UTC
Positive observed amounts, separated by currency and price basis
CurrencyPrice basisRecordsMinimumMaximumMean
USDObserved public listing prices2210.000015999.00006137.6700000000000000

Amounts without an established currency are retained in the history below and excluded from monetary comparisons. Bids, public listing prices and accepted amounts are distinct; no currency conversion is applied.

Up to 50 recent listing and quantity-change observations. Observation time is not sale time. Invalid or ambiguous timestamps remain unplotted.
Time recordedListingObservationPublic priceRecorded acceptance
Oct 4, 2026 07:51 UTC3156115-651 / RF GENERATOR, HF, APEX 5513, 27-368622-00 / ADVANCED ENERGYCompleted listing price10375.8 (currency not captured)Not established
Aug 5, 2026 07:49 UTC3156115-651 / RF GENERATOR, HF, APEX 5513, 27-368622-00 / ADVANCED ENERGYCompleted listing price10625.9 (currency not captured)Not established
Jul 2, 2026 07:48 UTCMN3156115-745/ AE APEX 5513 RF II AMAT 0190-64240WCompleted listing price10 (currency not captured)Not established
Jul 2, 2026 07:48 UTCMN3156115-742/ AE APEX 5513 II AMAT 0190-53880Completed listing price10 (currency not captured)Not established
Jul 2, 2026 07:48 UTCAE Apex RF Generator 5513 MN3156115-742 MN3156115-745AMAT0190-53880/0190-64240Completed listing price99 (currency not captured)Not established
Jun 6, 2026 07:47 UTC3156115-651 / RF GENERATOR, HF, APEX 5513, 27-368622-00 / ADVANCED ENERGYCompleted listing price10500.9 (currency not captured)Not established
May 19, 2026 15:14 UTCADVANCED ENERGY AE APEX 5513 3156115-003 RF POWER GENERATORCompleted listing price8999 (currency not captured)Not established
Jan 30, 2026 16:54 UTCApex 5513 AE Advanced Energy A3F4B070BA110A010ACompleted listing price4900 (currency not captured)Not established
Dec 27, 2025 02:22 UTCAE APEX-5513 PN 3156115-705 Novellus Power Supply 208V 5.5kW 13.56MHzCompleted listing price3199.99 (currency not captured)Not established
Dec 12, 2025 02:52 UTCApex 5513 AE Advanced Energy A3F5K000BA120A131A RF Generator Working SurplusCompleted listing price10002.2 (currency not captured)Not established
Dec 12, 2025 00:43 UTCApex 5513 AE Advanced Energy 3156115-251 RF Generator 27-373073-00 RefurbishedCompleted listing price9508.25 (currency not captured)Not established
Dec 11, 2025 23:35 UTCApex 5513 AE Advanced Energy 3155115-007 RF Lam 27-284656-00 Tested WorkingCompleted listing price6008.25 (currency not captured)Not established
Nov 11, 2025 02:25 UTCADVANCED ENERGY Apex 5513 RF GENERATOR PN 3156115-205, 208V, new with COC.Completed listing price10000 (currency not captured)Not established
Nov 6, 2025 17:43 UTC27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGYCompleted listing price4500.89 (currency not captured)Not established
Nov 3, 2025 22:46 UTCADVANCED ENERGY AE APEX 5513 0190-61998-03 pin 3156115-744 REV A F/R ACompleted listing price3900 (currency not captured)Not established
Nov 3, 2025 15:12 UTC27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGYCompleted listing price4500.89 (currency not captured)Not established
Oct 19, 2025 20:08 UTCAE APEX-5513 P/N 3156115-007 C, Novellus P/N 27-284656-00Completed listing price3750 (currency not captured)Not established
Sep 12, 2025 06:55 UTCAE Advanced Energy 2305843-A APEX Motherboard PCB SEMI F-47 5513 Working SurplusCompleted listing price1012.23 (currency not captured)Not established
Aug 30, 2025 08:19 UTC27-373073-00 / RF GENERATOR APEX 5513 3156115-251 / ADVANCED ENERGYCompleted listing price4500.89 (currency not captured)Not established
Aug 21, 2025 01:24 UTCADVANCED ENERGY Apex 5513 RF GENERATOR PN 3156115-205, 208V, Used /TestedCompleted listing price8500 (currency not captured)Not established
Aug 12, 2025 21:10 UTCApex 5513 AE Advanced Energy 3155115-007 RF Novellus 27-284656-00 Tested WorkingCompleted listing price8002.24 (currency not captured)Not established
Jul 15, 2025 15:10 UTCADVANCED ENERGY APEX 5513 RF GENERATOR, P/N: 27-278204-00 3156115-003Completed listing price15882 (currency not captured)Not established
Jun 26, 2025 16:10 UTCADVANCED ENERGY RF APEX 5513 M/N 3156115-204A FREE EXPEDITED SHIPPINGCompleted listing price7500 (currency not captured)Not established
Jun 18, 2025 23:54 UTCApex 5513 AE Advanced Energy 27-284656-00 RF Generator Novellus Dented As-IsCompleted listing price6011.24 (currency not captured)Not established
May 2, 2025 16:19 UTCADVANCED ENERGY APEX 5513, P/N A3F4B070BA110A010A AECompleted listing price3250 (currency not captured)Not established
Apr 30, 2025 20:27 UTCADVANCED ENERGY APEX 5513, P/N A3F4B070BA110A010A AECompleted listing price3250 (currency not captured)Not established
Apr 30, 2025 19:48 UTCApex 5513 Advanced Energy High Frequency GeneratorCompleted listing price2400 (currency not captured)Not established
Apr 22, 2025 17:11 UTCApex 5513 AE Advanced Energy 3156115-007 RF Generator Novellus 27-284656-00Completed listing price10012.2 (currency not captured)Not established
Apr 4, 2025 02:17 UTCApex 5513 AE Advanced Energy 3155115-007 RF Novellus 27-284656-00 Tested WorkingCompleted listing price6501.46 (currency not captured)Not established
Mar 26, 2025 23:18 UTCAE Apex 5513 Advanced Energy High Frequency Generator from Japan usedCompleted listing price1399 (currency not captured)Not established
Mar 19, 2025 03:49 UTCAdvanced Energy AE APEX 5513 RF Generator, 3156115-212 5.5KW,13.56MHz AS-IS USEDCompleted listing price4689.99 (currency not captured)Not established
Feb 17, 2025 09:55 UTCAPEX 5513 ADVANCED ENERGY HIGH FREQUENCY GENERATOR BLACK USED FROMNJAPANCompleted listing price2098.82 (currency not captured)Not established
Jan 24, 2025 16:52 UTCAE Apex 5513 Advanced Energy High Frequency Generator from Japan used F/SCompleted listing price2541.76 (currency not captured)Not established
Jan 9, 2025 19:21 UTCAdvanced Energy Apex 5513 5.5kwCompleted listing price2100 (currency not captured)Not established
Jan 9, 2025 18:42 UTCApex 5513 Advanced Energy High Frequency GeneratorCompleted listing price2300 (currency not captured)Not established
Dec 29, 2024 09:33 UTCAE Apex 5513 Advanced Energy High Frequency Generator Used Free Shipping JapanCompleted listing price2697.86 (currency not captured)Not established
Dec 27, 2024 01:13 UTCAE Apex 5513 Advanced Energy High Frequency Generator from Japan usedCompleted listing price2098.98 (currency not captured)Not established
Dec 6, 2024 18:18 UTC3156115-651 / RF GENERATOR, HF, APEX 5513, 27-368622-00 / ADVANCED ENERGYCompleted listing price12501 (currency not captured)Not established
Dec 4, 2024 05:08 UTCAdvanced Energy AE 3156115-704 RF Generator, Apex 5513, Mattson 1021925, 146975Completed listing price12250 (currency not captured)Not established
Nov 29, 2024 05:18 UTCAE Apex 5513 Advanced Energy High Frequency Generator from Japan usedCompleted listing price1899 (currency not captured)Not established
Nov 12, 2024 13:42 UTCApex 5513 Advanced Energy AE RF Generator 3156115-704Completed listing price5999 (currency not captured)Not established
Nov 1, 2024 14:44 UTCApex 5513 AE Advanced Energy 3156115-053 RF Novellus 27-365881-00 Tested As-IsCompleted listing price5002.24 (currency not captured)Not established
Oct 8, 2024 10:10 UTCAE Apex 5513 Advanced Energy High Frequency Generator ApexCompleted listing price1899.05 (currency not captured)Not established
Sep 23, 2024 14:05 UTCAE Apex 5513 Advanced Energy High Frequency Generator as isCompleted listing price2099 (currency not captured)Not established
Sep 17, 2024 22:35 UTCAdvanced Energy P N 1021925 PIN 3156115-704 RF Generator, Apex 5513, Date 2021Completed listing price1 (currency not captured)Not established
Sep 17, 2024 22:35 UTCAdvanced Energy Apex 5513 P N 1021925 PIN 3156115-704 RF Generator, Date 2022Completed listing price1 (currency not captured)Not established
Sep 17, 2024 21:37 UTC24033 ADVANCED ENERGY APEX 5513 RF GENERATOR 3156115-231Completed listing price1 (currency not captured)Not established
Sep 5, 2024 16:37 UTCAE Apex 5513 Advanced Energy High Frequency Generator from JapanCompleted listing price2188.88 (currency not captured)Not established
Sep 4, 2024 02:52 UTCAE Apex 5513 Advanced Energy High Frequency Generator from Japan usedCompleted listing price2352.22 (currency not captured)Not established
Sep 4, 2024 02:52 UTCAE Apex 5513 Advanced Energy High Frequency Generator Used Free Shipping JapanCompleted listing price2353.87 (currency not captured)Not established

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Search Results

2 matching parts.